EUV Light Generation System Performance Recovery Method
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Solution Overview
Problem
Existing EUV light generation systems face challenges in rapidly recovering performance after errors or maintenance, requiring extensive and time-consuming performance recovery processing.
Innovation Solution
A performance recovery method that includes a processor-configured evaluation and adjustment process, where the system evaluates EUV light performance at different repetition frequencies, adjusts parameters as needed, and terminates processing when performance standards are not met.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If extensive performance recovery processing is performed to ensure system performance, then reliability is improved, but loss of time increases
Solution Approach 1:
The performance recovery process is divided into multiple evaluation steps (first evaluation step, check step, second evaluation step) with different time periods. Each step evaluates performance under specific conditions (short period, medium period, long period) to systematically recover system performance without unnecessary time consumption.
Solution Approach 2:
The evaluation process dynamically adjusts the time period based on the evaluation results. The system performs evaluation at a first time period, and if performance is not within normal range, continues with adjustment and re-evaluation. This dynamic approach allows the system to adapt the recovery process length based on actual performance recovery needs.
2Measurement precision
If multiple evaluation steps are performed to thoroughly assess performance, then measurement precision is improved, but loss of time increases
Solution Approach 1:
The evaluation process is segmented into distinct steps: first evaluation step at a first time period, check step with adjustment, and second evaluation step at a second time period. Each step focuses on specific performance aspects, providing comprehensive measurement precision while managing evaluation time through structured progression.
Solution Approach 2:
The check step serves as a preliminary action between the first and second evaluation steps. It performs adjustment and re-evaluation to ensure performance is within normal range before proceeding to the second evaluation step, preventing unnecessary lengthy evaluations when performance is already recovered.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method allows for rapid recovery of EUV light generation system performance, reducing the number of steps required in the recovery process and enabling quicker return to operational standards.
Implementation Method 1
irradiating a target with pulse laser light
Implementation Method 2
laser produced plasma (LPP) type EUV light generation apparatus using plasma generated by irradiating a target substance with laser light
Data Source
AI summary
A performance recovery method for an EUV light generation system includes performing a first evaluation step of evaluating performance of EUV light while generating the EUV light at a certain repetition frequency during a first period; performing, when an evaluation result of the first evaluation step is not within a normal range, an adjustment step of adjusting the performance and then the first evaluation step as a check step; performing, when an evaluation result of the check step is within the normal range, a second evaluation step of evaluating performance of the EUV light while generating the EUV light at the repetition frequency during a second period longer than the first period; and terminating processing when the evaluation result of the check step is not within the normal range. An index related to an irradiation position of pulse laser light is evaluated in the first and second evaluation steps.