EUV Radiation Source Using Phased Fuel Particle Streams
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Solution Overview
Problem
Current EUV radiation sources for lithography face challenges in increasing radiation output while maintaining high power generation without causing plasma-induced deviations in fuel particle trajectories and excessive contamination.
Innovation Solution
The method involves directing multiple streams of fuel particles along specific trajectories within a plasma formation region, ensuring that each particle is timed to cross the excitation beam such that adjacent particles are spaced far enough to avoid plasma interference, and using a synchronized controller to manage the timing of these crossings, thereby optimizing radiation generation and minimizing contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If multiple streams of fuel particles are directed to cross the excitation beam simultaneously to increase radiation output, then radiation power is improved, but plasma-induced deviations in fuel particle trajectories increase causing contamination and reduced reliability
Solution Approach 1:
The patent implements periodic action by timing the crossing of fuel particles from multiple streams to occur at different moments. The synchronized controller ensures that particles are introduced in a periodic sequence rather than simultaneously, allowing plasma from previous crossings to dissipate before the next particle arrives. This temporal separation maintains high radiation output while preventing plasma-induced trajectory deviations that would cause contamination and reduce system reliability.
Solution Approach 2:
The synchronized controller performs preliminary action by calculating and determining the optimal timing for each fuel particle stream crossing before the actual excitation occurs. By pre-coordinating the timing of multiple streams and ensuring adequate spacing between crossings, the system prevents plasma interference with subsequent particles, thereby maintaining trajectory accuracy and reducing contamination while still achieving high radiation power output.
2Power
If fuel particles are spaced closer together to increase particle density and radiation efficiency, then radiation output is improved, but plasma from one particle affects the trajectory of adjacent particles causing contamination
Solution Approach 1:
The synchronized controller implements periodic action by establishing a time sequence for particle crossings from multiple streams. Rather than allowing continuous or simultaneous crossings that would cause plasma contamination, the system uses periodic timing intervals that allow plasma to dissipate between particle arrivals. This maintains high effective particle density for radiation efficiency while preventing plasma-induced contamination through temporal separation.
3Productivity
If the frequency of fuel particle crossings is increased to improve radiation output, then productivity is improved, but plasma interference increases causing trajectory deviations and reduced reliability
Solution Approach 1:
The synchronized controller resolves this contradiction by implementing periodic action with optimized timing intervals. The system coordinates multiple fuel particle streams to cross the excitation beam in a periodic sequence, where the period is carefully chosen to allow plasma dissipation while maintaining high overall crossing frequency. This approach achieves high productivity through multiple coordinated streams rather than single high-frequency crossings, thereby maintaining trajectory accuracy and reliability while improving radiation generation rate.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances radiation output by ensuring efficient plasma formation and reduced contamination, maintaining the accuracy of fuel particle trajectories and extending the lifespan of the radiation source.
Implementation Method 1
the fuel particles are excited by the excitation beam to form a plasma to generate radiation within the plasma formation region
Implementation Method 2
an excitation beam, such as a laser, for exciting a fuel to provide the plasma
Data Source
AI summary
A radiation source (e.g., LPP—laser produced plasma source) for generation of extreme UV (EUV) radiation has at least two fuel particle streams having different trajectories. Each stream is directed to cross the path of an excitation (laser) beam focused at a plasma formation region, but the trajectories are spaced apart at the plasma formation region, and the streams phased, so that only one stream has a fuel particle in the plasma formation region at any time, and so that when a fuel particle from one stream is generating plasma and EUV radiation at the plasma generation region, other fuel particles are sufficiently spaced so as to be substantially unaffected by the plasma. The arrangement permits potential doubling of the radiation intensity achievable for a particular fuel particle size.