EUV Light Generation Device Piezoelectric Nozzle Temperature Control

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Solution Overview

Problem

Existing extreme ultraviolet light generation devices face challenges in maintaining stable droplet connection during the EUV light generation process due to temperature deviations between the duty adjustment and actual operation conditions, affecting the vibration characteristics and droplet connection efficiency.

Innovation Solution

The implementation of a preliminary drive process for the piezoelectric element, either rated or high-load, to equate the piezoelectric-unit temperature before the duty adjustment, ensuring that the duty adjustment is performed under conditions similar to the actual EUV light generation process, thereby maintaining stable droplet connection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If duty adjustment is performed without preliminary drive, then the adjustment process is simpler and faster, but the piezoelectric-unit temperature deviates between adjustment and actual operation, causing unstable droplet connection

Engineering Contradiction:

Improvedroplet connection stabilityVSAvoidoperation process complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by performing a preliminary drive of the piezoelectric element before conducting duty adjustment. This preliminary drive pre-heats the piezoelectric unit to a temperature close to the actual operation temperature, ensuring that the droplet connection characteristics observed during duty adjustment reflect the true operating conditions. The control unit stores the drive conditions used during preliminary drive and retrieves them for actual operation, maintaining temperature consistency across adjustment and operation phases.

Inventive Principle:

Principle #10Preliminary action

2Measurement precision

If preliminary drive is performed before duty adjustment, then the piezoelectric-unit temperature during adjustment matches actual operation temperature, but the overall process time increases

Engineering Contradiction:

Improvetemperature condition accuracyVSAvoidprocess setup time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The patent applies partial action by performing a preliminary drive at rated conditions that partially achieves the temperature elevation needed for accurate duty adjustment. Rather than requiring extensive pre-heating, the rated preliminary drive provides sufficient temperature elevation to make the droplet connection characteristics during adjustment representative of actual operation. This balanced approach achieves adequate temperature matching without excessive time investment.

Inventive Principle:

Principle #16Partial or excessive action

3Speed

If high-load preliminary drive is performed, then the piezoelectric-unit temperature is elevated faster to match operation conditions, but the risk of overheating and damage increases

Engineering Contradiction:

Improvetemperature elevation speedVSAvoidoverheating risk

Core Design Contradiction:

SpeedVSObject-affected harmful factors

Solution Approach 1:

The patent applies periodic action by using a rated preliminary drive that operates at normal rated conditions rather than continuous high-load drive. This periodic rated drive safely elevates the piezoelectric unit temperature to near operation temperature without causing overheating. The control unit monitors the drive conditions and ensures the preliminary drive remains within safe operational parameters, preventing thermal damage while achieving sufficient temperature elevation for accurate duty adjustment.

Inventive Principle:

Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach ensures that the piezoelectric-unit temperature during the duty adjustment and the EUV light generation process are substantially equal, maintaining droplet connection and improving the efficiency of the EUV light generation process.

Implementation Method 1

a piezoelectric element configured to vibrate the nozzle under a droplet connection condition to regularly generate a droplet of the target substance

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

generates plasma from a target substance by irradiating the target substance with a laser beam to generate extreme ultraviolet light from the plasma

Methodology Applied

Scientific EffectLaser irradiation: Laser

Data Source

PatentUS10955760B2Extreme ultraviolet light generation device and target supply device

Publication Date: 2021.03.23 GIGAPHOTON INC

AI summary

An extreme ultraviolet light generation device includes: a target supply unit including a nozzle through which a target substance in a liquid form is output into a chamber; a piezoelectric element configured to vibrate the nozzle under a droplet connection condition to regularly generate a droplet of the target substance; and a control unit configured to perform search processing of changing a drive condition of the piezoelectric element to search for a drive condition of the piezoelectric element corresponding to the droplet connection condition and configured to set a drive condition of the piezoelectric element used for generation of extreme ultraviolet light based on a result of the search processing. The control unit preliminarily drives the piezoelectric element before performing the search processing and starts the search processing after performing the preliminary drive.