EUV Target Supply Pin Load Adjustment for Droplet Stability

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Solution Overview

Problem

Current extreme ultraviolet (EUV) light generation systems face challenges in maintaining stable droplet coalescence and EUV light emission due to variations in pin load caused by temperature changes and disturbances, leading to instability in droplet coalescence and EUV light emission.

Innovation Solution

Incorporating a pin load adjustment device that adjusts the force applied to the pin load bolts to maintain a consistent pin load, using a combination of pin load springs and pin load adjustment devices driven by piezoelectric elements or other actuators to stabilize the pin load during temperature changes and disturbances.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a fixed pin load structure is used to hold the vibration transfer unit against the nozzle, then the structure is simple, but the pin load varies due to temperature changes and disturbances causing instability in droplet coalescence

Engineering Contradiction:

Improvestability of droplet coalescenceVSAvoidcomplexity of pin load adjustment mechanism

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The pin load structure is transformed from a static fixed configuration to a dynamic adjustable system. The load application member can change its pressing force in response to temperature variations and operational disturbances, allowing the system to adapt and maintain stable droplet coalescence despite environmental changes.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The load adjustment device monitors the actual pin load and compares it with a target value, then automatically adjusts the pressing force of the load application member to compensate for deviations caused by temperature changes and disturbances. This closed-loop feedback mechanism ensures consistent droplet coalescence stability.

Inventive Principle:

Principle #23Feedback

2Reliability

If the pressing load is increased to improve droplet coalescence stability, then droplet coalescence becomes more stable, but the system becomes more sensitive to temperature changes and disturbances

Engineering Contradiction:

Improvestability of EUV light emissionVSAvoidsensitivity to temperature changes

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The system dynamically adjusts the pin load parameter based on detected temperature changes and operational conditions. By changing the pressing force parameter in response to environmental variations, the system maintains optimal droplet coalescence stability without being overly sensitive to temperature fluctuations.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The load adjustment device anticipates and counteracts the effects of temperature changes and disturbances before they significantly impact droplet coalescence. By applying compensatory pressing forces in advance or in real-time response to detected changes, the system prevents instability rather than reacting to it after occurrence.

Inventive Principle:

Principle #9Preliminary anti-action

3Manufacturing precision

If a simple fixed pin load structure is used, then the device is easier to manufacture, but it cannot maintain consistent pin load under varying operational conditions

Engineering Contradiction:

Improveconsistency of pin loadVSAvoidease of manufacturing pin load adjustment device

Core Design Contradiction:

Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The load application member acts as an intermediary between the fixed mounting structure and the vibration transfer unit. This intermediate component provides the necessary adjustment capability while maintaining a relatively simple overall structure that is feasible to manufacture, bridging the gap between manufacturing simplicity and operational precision.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution stabilizes droplet coalescence and EUV light emission by maintaining a consistent pin load, reducing variations and improving the robustness of the droplet generator against temperature changes and operational disturbances.

Implementation Method 1

a vibration element configured to vibrate in accordance with applied drive voltage

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a vibration transfer unit contacting the nozzle and configured to transfer vibration of the vibration element to the nozzle

Methodology Applied

Scientific EffectMechanical vibration transfer: Vibration

Implementation Method 3

a load application member configured to apply a pressing load for pressing the vibration transfer unit against the nozzle

Methodology Applied

Scientific EffectMechanical force: Mechanical Force

Data Source

PatentUS11266001B2Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method

Publication Date: 2022.03.01 GIGAPHOTON INC

AI summary

A target supply device according to an aspect of the present disclosure includes a nozzle through which a liquid target substance is output, and a vibration unit configured to vibrate the target substance supplied to the nozzle, and the vibration unit includes a vibration element configured to vibrate in accordance with applied drive voltage from outside, a vibration transfer unit contacting the nozzle and configured to transfer vibration of the vibration element to the nozzle, a load application member configured to apply a pressing load for pressing the vibration transfer unit against the nozzle, and a load adjustment device configured to adjust the pressing load in accordance with a signal from outside.