EUV Radiation Generation Using Plane Mirrors to Reduce Wavefront Distortions
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Solution Overview
Problem
Existing methods for generating extreme ultra violet radiation face inefficiencies due to wavefront distortions and increased pulsewidth when using beam splitters, which reduce the coherence and overall efficiency of the process.
Innovation Solution
The use of a plane mirror instead of a beam splitter in the optical system, along with position sensors and adjusting apparatuses, to optimize the reflection and transmission of laser beams, enhancing the interaction with a gas cell and improving the generation of extreme ultra violet radiation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a beam splitter is used in the optical system, then light can be divided and directed to multiple components, but wavefront distortions occur and pulsewidth increases, reducing coherence and efficiency
Solution Approach 1:
The patent removes the beam splitter component from the optical system entirely, extracting the problematic element that causes wavefront distortions and pulsewidth increases. Instead of using a beam splitter to divide light, the system uses a single reflected light path with mirrors to direct light to the gas cell, thereby eliminating the source of coherence degradation while maintaining the necessary light distribution functionality.
2Adaptability or versatility
If a beam splitter is used in the optical system, then light can be directed to multiple components, but the overall efficiency of extreme ultra violet radiation generation decreases
Solution Approach 1:
The beam splitter is removed from the system to eliminate efficiency losses. The patent employs a simplified optical path using only reflective components (mirrors) to direct the laser beam through the gas cell, thereby maximizing the energy efficiency of extreme ultra violet radiation generation while maintaining the necessary light routing functionality.
3Ease of manufacture
If the optical system uses traditional components, then the structure is well-established, but wavefront distortions and increased pulsewidth reduce the quality of extreme ultra violet radiation
Solution Approach 1:
The patent eliminates traditional beam splitter components that introduce wavefront distortions and pulsewidth increases. By using a simplified reflective optical system, the invention maintains ease of manufacture with standard mirror components while significantly improving radiation quality through reduced wavefront distortions and maintained pulsewidth.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach increases the efficiency of extreme ultra violet radiation generation by reducing wavefront distortions and pulsewidth issues, resulting in improved coherence and a 20% or greater increase in radiation output.
Implementation Method 1
High-harmonic generation is performed such that a high electric field varying with time is applied to inert gas, such as Ar, Ne or Xe, to ionize electrons to then be moved along the trajectory. The electrons are recombined to then generate light in an EUV band with energy corresponding to a sum of ionized energy and electronic motion energy.
Implementation Method 2
a reflecting mirror which receives light and provides reflected light forward and transmitted light rearward
Implementation Method 3
a focus mirror which receives the reflected light
Data Source
AI summary
An apparatus and a method for generating extreme ultra violet radiation are provided. The apparatus for generating extreme ultra violet radiation includes a light source, a first reflecting mirror on which source light emitted from the light source is incident, a second reflecting mirror on which first reflected light reflected by the first reflecting mirror is incident, a focus mirror on which second reflected light reflected by the second reflecting mirror is incident, the focus mirror reflecting third reflected light back to the second reflecting mirror, and a gas cell on which fourth reflected light reflected by the second reflecting mirror is incident.