EUV Inner Pod Compliant Pin Support for Localized Deformation
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Solution Overview
Problem
The existing reticle pods for EUV reticles experience high pressure and localized deformation due to uneven support and clamping, leading to accelerated wear and alignment issues.
Innovation Solution
Implementing compliant KC pins and safety catch pins that are spring-loaded or activated by the pod door mechanism to distribute support evenly across the inner pod, ensuring accurate alignment and reducing wear by distributing clamping forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the inner pod is clamped within the outer pod using conventional fixed pins, then the inner pod is securely held during transport, but high pressure areas and localized deformation occur leading to accelerated wear
Solution Approach 1:
The pin support structure is changed from fixed rigid pins to compliant pins that can deform elastically. This parameter change in rigidity allows the pins to conform to the baseplate surface, distributing contact pressure evenly and eliminating localized high pressure areas that cause wear.
Solution Approach 2:
The support system transitions from static fixed pins to dynamic compliant pins that can adjust their position and contact force. The compliant pins dynamically adapt to variations in the baseplate surface, maintaining uniform pressure distribution while securely holding the inner pod during transport.
2Manufacturing precision
If conventional fixed pins are used for support, then alignment is maintained, but inaccurate alignment occurs due to localized deformation
Solution Approach 1:
By changing the mechanical property of the pins from rigid to compliant, the system eliminates localized deformation of the baseplate. The compliant pins accommodate surface variations without causing deformation, thereby maintaining accurate alignment of the inner pod with the outer pod during transport and handling.
3Ease of operation
If safety catch pins are in clearance with the baseplate, then tilt during loading is minimized, but support is insufficient when load is applied
Solution Approach 1:
The function of support is merged from a single set of pins to two sets: KC pins for primary support and safety catch pins for secondary support. When the pod door is closed, both sets of pins contact the baseplate, combining their support forces to adequately bear the load while maintaining the clearance design that prevents tilt during loading.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces wear and maintains accurate alignment of EUV reticle pods by distributing clamping forces, enhancing the durability and reliability of reticle handling and transport.
Implementation Method 1
compliant KC pins so that when the outer pod clamps the inner pod, most of the support can be supplied by the safety catch pins
Implementation Method 2
the safety catch pins can be driven by the pod door latch cam and/or latch arms
Data Source
AI summary
An apparatus includes an inner container having a baseplate and a cover, an outer container having a pod dome and a pod door, and a first set of pins and a second set of pins disposed on the pod door. The pod door has a locked state and an unlocked state. The first set of pins and the second set of pins are configured to support the baseplate. When the pod door is in the unlocked state and the first set of pins contacts the baseplate, a clearance is formed between the second set of pins and the baseplate. When the pod door is in the locked state, the first set of pins and the second set of pins contact the baseplate.