EUV Light Generation Apparatus Pressure Prediction
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Solution Overview
Problem
Existing extreme ultraviolet light generation apparatuses face challenges in predicting the timing of maintenance and the amount of EUV light that can be emitted before maintenance is required, due to accumulation of target substances in discharge units, which affects the apparatus's operational efficiency and reliability.
Innovation Solution
The apparatus includes a control unit that uses pressure measurements and elapsed time or number of light emission operations to predict when the internal space will reach a predetermined pressure, allowing for timely maintenance and optimizing EUV light production.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the discharge unit continuously discharges residual gas to maintain vacuum, then the vacuum quality is improved, but the target substance accumulates in the discharge unit requiring frequent maintenance
Solution Approach 1:
The control unit performs preliminary prediction of the internal space pressure based on elapsed time and/or number of light emission operations before actual maintenance is needed. This allows operators to plan maintenance in advance, reducing unexpected downtime while maintaining vacuum quality through continuous discharge.
Solution Approach 2:
The system uses feedback from pressure sensors and operational data (elapsed time, light emission count) to continuously update predictions of when the internal space will reach predetermined pressure. This closed-loop feedback enables optimized maintenance scheduling that balances vacuum maintenance with operational continuity.
2Reliability
If maintenance is performed frequently to prevent target substance accumulation, then the reliability is improved, but the productivity decreases due to more frequent interruptions
Solution Approach 1:
The control unit predicts the time or number of operations until predetermined pressure is reached before maintenance is actually needed. This preliminary prediction allows operators to schedule maintenance during planned downtime rather than performing frequent reactive maintenance, thereby maintaining reliability while minimizing interruptions to EUV light production.
3Productivity
If the apparatus operates continuously to maximize EUV light production, then the productivity is improved, but the target substance accumulates faster requiring more frequent maintenance
Solution Approach 1:
The control unit continuously predicts the time or operational count until predetermined pressure is reached based on real-time data from pressure sensors and operational counters. This preliminary prediction capability allows operators to maximize continuous operation for EUV light production while having advance notice of when maintenance will be needed, effectively decoupling productivity optimization from maintenance scheduling uncertainty.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This predictive capability enables operators to plan maintenance effectively, ensuring continuous operation and maximizing EUV light output before maintenance is necessary, thereby improving the apparatus's efficiency and reliability.
Implementation Method 1
a chamber having an internal space in which extreme ultraviolet light is generated when a target substance supplied to the internal space is irradiated with a laser beam
Implementation Method 2
a discharge unit configured to discharge residual gas from the internal space
Data Source
AI summary
An extreme ultraviolet light generation apparatus includes a chamber (10) having an internal space in which extreme ultraviolet light is generated when a target substance supplied to the internal space is irradiated with a laser beam (301), a gas supply unit (63) configured to supply etching gas to the internal space, a discharge unit (61) configured to discharge residual gas from the internal space, a pressure sensor (26) configured to measure a pressure in the internal space, and a control unit (20), and the control unit (20) may predict a time until the pressure in the internal space reaches a predetermined pressure by using a relation between an elapsed time since start of a predetermined duration including a duration in which the extreme ultraviolet light is generated and a pressure measured in the predetermined duration.