Adjustable Protective Ring for EUV Vacuum Interface Sealing
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Solution Overview
Problem
Existing EUV chamber inspection techniques are inadequate in preventing damage to the vacuum interface during preventive maintenance, leading to air leaks and contamination, which affects the quality and yield of the EUV process.
Innovation Solution
A protective ring structure is introduced, comprising an outer and inner ring with an adjustable opening, secured to the vacuum interface to protect it from damage during metrology apparatus insertion, ensuring a secure seal and preventing exposure to potential harm.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If preventive maintenance is performed on the EUV chamber, then contamination and component degradation are reduced, but the vacuum interface is exposed to damage and air leaks
Solution Approach 1:
A protective ring structure is introduced as an intermediary component between the metrology apparatus and the vacuum interface. This protective ring acts as a mediator that allows the maintenance operation to proceed while preventing direct contact between the apparatus and the vulnerable vacuum interface, thus resolving the contradiction between performing maintenance and protecting the interface from damage
Solution Approach 2:
The protective ring is installed on the vacuum interface before the metrology apparatus is inserted. This preliminary protective action ensures that the vacuum interface is already shielded against potential damage before the maintenance operation begins, allowing safe prevention of contamination while avoiding interface damage
2Ease of operation
If the vacuum interface is exposed for maintenance, then inspection and maintenance access is improved, but air leaks and contamination occur
Solution Approach 1:
The protective ring serves as a mediator that enables maintenance access while blocking the harmful effects. It allows the metrology apparatus to pass through and access the vacuum interface for inspection and maintenance, while simultaneously preventing air leaks and contamination from entering the vacuum chamber
Solution Approach 2:
The protective ring extracts or separates the vulnerable vacuum interface from the harmful environment created during maintenance operations. By isolating the interface within the protective ring structure, the system allows maintenance access while extracting the interface from direct exposure to air leaks and contamination sources
3Reliability
If a protective structure is added to the vacuum interface, then damage prevention is improved, but device complexity increases
Solution Approach 1:
The protective structure is segmented into a separate protective ring component that can be independently installed on the vacuum interface. This segmentation allows the protection function to be added as a discrete element rather than integrating complex protection mechanisms into the existing interface structure, thus improving reliability while minimizing the increase in overall device complexity
Solution Approach 2:
The protective ring is designed as a simple, easily replaceable component that provides effective protection without adding significant complexity. If the protective ring itself becomes damaged or contaminated, it can be quickly replaced without affecting the entire vacuum interface system, making the added complexity worthwhile by protecting the more valuable and complex vacuum interface
Data Source
AI summary
An assembly for use with an extreme ultraviolet (EUV) chamber, along with methods of using such, are described. The assembly includes a ring structure. The ring structure includes an outer ring and an inner ring disposed radially inward of the outer ring. The assembly also includes a vacuum interface to be attached and in contact with the inner ring, wherein the inner ring has an opening that is size adjustable to allow a device to pass through and into the vacuum interface.