EUV Radiation Sensor Using Gas Chamber and Resonant Cavity
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current radiation sensor technologies face challenges in accurately determining the position and power of radiation beams, particularly in EUV lithographic systems, due to the high absorption of EUV radiation by matter and the need for precise measurement in vacuum environments.
Innovation Solution
A radiation sensor apparatus is designed with a chamber containing a gas that emits secondary radiation when interacted with the radiation beam, using sensors and filtering optics to detect and filter secondary radiation for accurate position and power determination, and a resonant cavity to measure power based on changes in resonant frequency caused by the radiation beam.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If EUV radiation is used for lithography, then smaller features can be formed on substrate, but radiation absorption by matter increases significantly
Solution Approach 1:
The patent uses a resonant cavity as an intermediary device to measure radiation power indirectly through resonant frequency shifts, avoiding direct interaction between EUV radiation and solid sensor materials that would cause absorption losses. The cavity modulates the radiation field to extract measurement information without significant energy loss.
Solution Approach 2:
The patent changes the measurement parameter from direct radiation detection to resonant frequency detection. By monitoring frequency shifts in a resonant cavity caused by radiation pressure or energy deposition, the system can measure radiation power without requiring solid detectors that absorb EUV radiation.
2Measurement precision
If sensors are placed to detect radiation directly, then position and power can be measured, but radiation absorption and attenuation increase
Solution Approach 1:
The patent replaces direct mechanical/optical radiation detection with a resonant electromagnetic field-based measurement system. The resonant cavity uses electromagnetic field interactions to measure radiation properties indirectly, avoiding the need for solid sensors that would absorb and attenuate the EUV radiation beam.
3Measurement precision
If filtering optics are added to detect secondary radiation, then measurement accuracy improves, but device complexity increases
Solution Approach 1:
The resonant cavity serves multiple functions simultaneously: it acts as both the measurement sensor and the filtering element. The cavity's resonant properties naturally select specific frequency ranges, providing both measurement capability and spectral filtering without requiring separate optical components, thus reducing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively determines the position and power of radiation beams with minimal attenuation, enabling precise control and monitoring in EUV lithographic systems, even in vacuum conditions, by utilizing secondary radiation and resonant frequency shifts.
Implementation Method 1
If the radiation beam has a sufficiently high frequency, it may cause ionization of a gas within the chamber. In turn, the resulting free electrons may ionize or excite gas molecules and/or radiate energy by photon emission.
Implementation Method 2
Excited gas molecules will undergo spontaneous radiation via photon emission. Therefore, the secondary radiation may be produced by a combination of bound-bound transitions, free-bound transitions and free-free transitions.
Implementation Method 3
a resonant cavity to measure power based on changes in resonant frequency caused by the radiation beam
Data Source
AI summary
A radiation sensor apparatus for determining a position and/or power of a radiation beam, the radiation sensor apparatus including a chamber to contain a gas, one or more sensors, and a processor. The chamber has a first opening and a second opening such that a radiation beam can enter the chamber through the first opening, propagate through the chamber generally along an axis, and exit the chamber through the second opening. Each of the one or more sensors is arranged to receive and detect radiation emitted from a region of the chamber around the axis. The processor is operable to use the radiation detected by the one or more sensors to determine a position and/or power of the radiation beam.