EUV Reticle Clamping for Compact Low-Contamination Storage
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Solution Overview
Problem
Conventional EUV reticle storage systems, such as double pods, are bulky, prone to chemical contamination, and mechanical damage, and require significant space, while also being costly to retrofit for improved handling and storage efficiency.
Innovation Solution
A clamping device for EUV inner pods (EIPs) that immobilizes EIP components and reticles using metallic materials, reducing the need for protective gases and minimizing spatial footprint by covering less than 90% of the EIP surface, and incorporating actuators to emulate the immobilization function of traditional outer pods.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional double pod systems are used to store and protect EUV reticles, then the reticles are protected from contamination and mechanical damage, but the storage system becomes bulky and requires significant space
Solution Approach 1:
The invention extracts the essential protection function from the bulky outer pod and implements it through a compact clamping device with clamping elements that can be attached to the inner pod. This separates the protective function from the large-volume container, achieving protection with minimal space requirement.
Solution Approach 2:
The protection system is segmented into modular components: the inner pod containing the reticle, and detachable clamping elements that provide protection only when needed. This segmentation allows the system to be compact during storage and provide full protection during handling operations.
2Stability of the object's composition
If traditional outer pods are used to immobilize inner pod components, then mechanical stability is achieved, but chemical contamination from polymeric materials occurs
Solution Approach 1:
The invention changes the material parameter of the clamping device from polymeric (in traditional outer pods) to metallic materials. This material substitution eliminates outgassing of volatile organic compounds while maintaining the mechanical stability and immobilization function of the inner pod components.
3Reliability
If complete coverage of the EIP is provided to protect the reticle, then maximum protection is achieved, but the spatial footprint increases significantly
Solution Approach 1:
The clamping elements provide protection locally at critical areas where the reticle and inner pod components need immobilization, rather than providing complete coverage. This localized protection approach achieves sufficient reliability while minimizing the spatial footprint to less than 90% coverage.
4Productivity
If existing stockers are retrofitted to accommodate improved handling systems, then storage efficiency is enhanced, but the cost and complexity of retrofitting increases
Solution Approach 1:
The clamping device is designed with universal compatibility to attach to standard inner pods used in existing stockers. This multi-functional design allows the same clamping mechanism to work with different inner pod configurations, enabling storage efficiency improvements without complex retrofitting of existing stocker systems.
Data Source
Figure 1A~1B
Figure 2B
Figure 2AA~2AB
AI summary
A clamping device (200, 500), a storage system (300, 600) and an operating method (400, 410) for an EUV reticle stocker are provided. The required space for storing EUV reticles is significantly reduced while ensuring a high quality storage environment for the stored EUV reticles. A Further aspect of the invention provides a stocker (700) for storing EUV reticles.