EUV Reticle Pod Pressure Sensor Fastening Detection

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Solution Overview

Problem

In EUV lithography, conventional reticle pods lack a reliable method to ensure the inner container is securely fastened within the outer container during storage and transport, leading to potential damage and increased costs due to uncertainty in the containers' separation and joining status during exposure processes.

Innovation Solution

Integration of pressure sensors between the outer and inner containers to detect pressure and provide electrical light signals indicating whether the inner container is securely fastened, along with a thermo-hygrometer to monitor environmental conditions, ensuring stable and secure storage and transport.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If pressure sensors are integrated between the outer and inner containers, then the reliability of detecting fastening status is improved, but the device complexity increases

Engineering Contradiction:

Improvefastening status detection reliabilityVSAvoidcontainer structure complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent replaces complex mechanical fastening indication mechanisms with pressure sensors that electronically detect and transmit fastening status. The pressure sensors convert mechanical pressure from fastening into electrical signals, eliminating the need for complex mechanical indicators while improving detection reliability.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The pressure sensors act as intermediaries between the mechanical fastening system and the detection system. They translate physical fastening pressure into detectable electrical signals, providing a reliable interface that simplifies the overall system while improving status detection accuracy.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Object-affected harmful factors

If multiple sensors are added to monitor environmental conditions, then the protection against contamination is improved, but the manufacturing cost increases

Engineering Contradiction:

Improvecontamination protectionVSAvoidmanufacturing simplicity

Core Design Contradiction:

Object-affected harmful factorsVSEase of manufacture

Solution Approach 1:

The patent integrates multiple sensor functions (pressure detection, temperature monitoring, humidity monitoring) into a single container system. These multi-functional sensors simultaneously protect against various harmful factors including contamination, extreme temperatures, and improper fastening, providing comprehensive protection without requiring separate dedicated systems for each function.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The sensors automatically monitor environmental conditions and fastening status without requiring external intervention. The system self-detects and reports issues such as contamination risks, temperature extremes, or improper sealing, enabling proactive protection and reducing the need for manual inspection and intervention.

Inventive Principle:

Principle #25Self-service

3Stability of the object's composition

If real-time monitoring is implemented during storage and transport, then the stability of reticle positioning is improved, but the energy consumption increases

Engineering Contradiction:

Improvereticle positioning stabilityVSAvoidsensor energy consumption

Core Design Contradiction:

Stability of the object's compositionVSUse of energy by moving object

Solution Approach 1:

The patent implements periodic monitoring cycles where sensors activate at intervals to check fastening status and environmental conditions rather than continuous monitoring. This periodic action maintains reticle positioning stability by detecting changes at critical intervals while significantly reducing energy consumption compared to continuous operation.

Inventive Principle:

Principle #19Periodic action

Solution Approach 2:

The sensors provide feedback signals when changes in fastening status or environmental conditions are detected, allowing the system to respond only when necessary. This feedback mechanism maintains positioning stability by alerting operators to actual issues while avoiding unnecessary continuous operation that would waste energy.

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution ensures the reticle pod's inner container is stably fastened, preventing damage from vacillation or collision, and maintains optimal environmental conditions, thereby reducing the risk of contamination and improving the quality of semiconductor products.

Implementation Method 1

pressure sensors disposed between the outer container and the inner container are used to detect pressure

Methodology Applied

Scientific EffectPressure detection:

Implementation Method 2

a thermo-hygrometer to monitor environmental conditions

Methodology Applied

Scientific EffectTemperature monitoring:

Implementation Method 3

a thermo-hygrometer to monitor environmental conditions

Methodology Applied

Scientific EffectHumidity monitoring:

Data Source

PatentUS8418853B2Reticle POD with sensor

Publication Date: 2013.04.16 GUDENG PRECISION IND CO LTD

AI summary

An EUV pod with pressure sensors disposed between its inner container and outer container, wherein pressure sensors disposed on the inner side of the outer container are used to detect the pressure between the outer container and the inner container, and the pressure data are used to determine whether the inner container is firmly fastened by the outer container.