EUV Reticle Stocker With One-Piece Metal Clamping for Compact Storage
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Solution Overview
Problem
Conventional EUV reticle storage systems, such as double pods, are bulky, prone to chemical contamination, and require significant space, while also being fragile and costly to maintain, leading to inefficiencies in photolithographic processes.
Innovation Solution
A one-piece clamping device made of metallic materials is used to immobilize EUV inner pods (EIPs) and reticles, reducing spatial footprint and chemical contamination by partially covering the EIP, allowing for improved storage and handling without altering existing photolithographic processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a double pod (EOP+EIP) is used to store and protect EUV reticles, then protection against contamination and mechanical damage is improved, but the spatial footprint and device complexity increase significantly
Solution Approach 1:
The invention extracts the essential protection function from the complex double pod system and implements it separately: the EIP provides contamination protection through its sealed design with filter elements, while the EOP's mechanical protection function is replaced by a simplified clamping device that secures the EIP without requiring the bulky outer pod structure
Solution Approach 2:
The invention segments the protection functions into separate components: the EIP handles chemical contamination protection through its sealed environment and filter systems, while a dedicated clamping device handles mechanical immobilization and protection, eliminating the need for the integrated but space-consuming double pod structure
2Ease of manufacture
If polymeric EOP material is used for reticle storage, then ease of manufacture is improved, but chemical contamination through outgassing increases
Solution Approach 1:
The invention changes the material parameter of the storage system from polymeric (EOP) to metallic materials, which have significantly lower outgassing rates and do not release volatile organic compounds, thereby eliminating the chemical contamination problem while maintaining manufacturability through standard metal fabrication processes
3Reliability
If reticle immobilization means are added to the EIP, then reliability of reticle positioning is improved, but device complexity and friction-induced abrasion increase
Solution Approach 1:
The invention applies immobilization features locally at the critical interface between the reticle and EIP components rather than throughout the entire system. The clamping device provides localized mechanical constraint where needed, while leaving other areas simple and free of complex immobilization mechanisms
Data Source
AI summary
A one-piece clamping device, a storage system and an operating method for an EUV reticle stocker are provided. The required space for storing EUV reticles is significantly reduced while ensuring a high quality storage environment for the stored EUV reticles. A further aspect provides a stocker for storing EUV reticles.