EUV Reticle Stocker Pod Horizontal Movement Prevention
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Solution Overview
Problem
EUV reticles are prone to contamination and require strict handling to prevent movement during transportation and storage, especially in earthquake-prone environments, which can lead to abrasion and damage.
Innovation Solution
A stocker system with holding structures and engagement features that prevent horizontal and vertical movement of storage pods, using complementary grooves and protrusions to secure EUV reticles, and a securing mechanism to maintain pod stability during earthquakes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If storage pods are stacked vertically to improve space utilization, then storage density is improved, but horizontal movement risk increases during earthquakes
Solution Approach 1:
The holding structure is divided into multiple holding members arranged vertically, each capable of independently engaging with storage pods at different heights. This segmentation allows the system to secure multiple stacked pods simultaneously while maintaining individual engagement reliability for each pod level.
Solution Approach 2:
The solution transitions from preventing only vertical movement to addressing horizontal movement by introducing holding members that extend in horizontal directions. The holding members are configured to engage storage pods from multiple dimensional perspectives, restricting movement in both vertical and horizontal planes.
2Reliability
If engagement features are added to prevent horizontal movement, then reliability is improved, but device complexity increases
Solution Approach 1:
The holding members are designed with multi-functionality, serving both as structural support elements and as engagement mechanisms. The same holding member that provides structural framework also incorporates engagement features that interact with storage pod handling members, eliminating the need for separate engagement devices.
Solution Approach 2:
The engagement features are designed to automatically engage and disengage storage pods through the existing stacking and handling operations. When storage pods are stacked or retrieved, the holding members self-engage with the pod handling members without requiring additional active mechanisms, reducing system complexity.
3Object-affected harmful factors
If holding members are added to prevent movement, then reticle protection is improved, but manufacturing complexity increases
Solution Approach 1:
The holding members are designed with uniform structures and standardized engagement features that can be manufactured using the same processes. This homogeneity across all holding members simplifies manufacturing by reducing the number of different part types and enabling standardized production techniques.
Solution Approach 2:
The engagement features are designed to nest within or around the existing storage pod handling members. The holding member engagement features interface with the storage pod handling members in a nested configuration, where one structure fits within or around the other, reducing the need for separate manufacturing operations.
Data Source
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AI summary
The invention relates to a stocker system (100) for storage of a plurality of reticles (150), especially EUV reticles. The stocker system (100) comprises a plurality of storage pods (111, 112, 113) each adapted to hold one of said reticles (150) in their interior, and to be stacked in a vertical direction (V) one above the other to provide a stack (110), each of the storage pods (111, 112, 113) being provided with two handling members (120) arranged on opposite sides of the storage pod (111, 112, 113) in a first horizontal direction (H1) and each of the handling members (120) being provided with a handling member engagement features (121). The stocker system (100) further comprises two holding structures (200) being provided with a plurality of holding members (210), each of the holding members (210) being provided with a holding member engagement element (211) adapted to engage with a corresponding handling member engagement feature (121), wherein the holding structures (200) are arranged such that, when the holding structures (200) are engaged with the plurality of storage pods (111, 112, 113), movement of the plurality of storage pods (111, 112, 113) in the first horizontal direction is prevented by the holding structures (200) and movement of the plurality of storage pods (111, 112, 113) in a second horizontal direction essentially perpendicular to the first horizontal direction (H1) is prevented by engagement of the handling member engagement features (121) with the holding member engagement elements (211). The invention further relates to storage stocker, a method and a device for retrieving a first storage pod (111) from a stack (110) comprising a plurality of storage pods, a method and a device for retrieving a reticle (150) from a stack (110) comprising a plurality of storage pods and a storage pod (111, 112, 113).