EUV Rotational Disk Rib Structure for On-Axis Light Collection
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Solution Overview
Problem
Conventional EUV light source devices with off-axis structures suffer from reduced light collection efficiency, despite their ability to stably induce plasma reactions.
Innovation Solution
A rotational disk structure for an EUV light source device is designed with an on-axis configuration, featuring rotational disk ribs that allow EUV light to penetrate through a collector mirror, enhancing light collection efficiency while maintaining target material supply and plasma reactions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If an off-axis structure is used in EUV light source devices, then the optical system arrangement is advantageous, but light collection efficiency is deteriorated
Solution Approach 1:
The patent inverts the conventional off-axis optical arrangement to an on-axis structure. The collector mirror is positioned to receive EUV light reflected from the target material along the same axis as the incident laser beam, fundamentally changing the optical path geometry to improve light collection efficiency while maintaining operational feasibility
2Loss of energy
If an on-axis structure is used to improve light collection efficiency, then light focusing is enhanced, but the target material supply system complexity increases
Solution Approach 1:
The rotational disk is segmented into multiple ribs that are radially arranged. These ribs create discrete channels for target material supply while maintaining the on-axis optical structure. The segmentation allows the laser beam to pass through the centers of the ribs without significant obstruction, reducing the complexity of avoiding material supply components
3Stability of the object's composition
If rotational disk ribs are added to support the rotational disk rim, then structural stability is improved, but light transmission is blocked
Solution Approach 1:
The rotational disk ribs are designed with non-uniform properties: they have sufficient thickness to provide structural stability at the rim, but their cross-sectional area and positioning are optimized to minimize obstruction of the EUV light path. The ribs are arranged radially with gaps between them, creating local variations in light transmission that balance structural needs with optical performance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The on-axis structure significantly improves light collection efficiency by allowing EUV light to be collected and focused effectively, while maintaining a stable target material supply system for EUV light generation.
Implementation Method 1
a rotational disk confining a target material by centrifugal force while rotating to generate EUV light through plasma reactions
Implementation Method 2
generate EUV light through plasma reactions with the target material
Implementation Method 3
receives the EUV light reflected from the target material, and collects the EUV light to the same incident light axis
Implementation Method 4
allows EUV light to be collected and focused effectively
Data Source
AI summary
The present invention relates to a rotational disk structure for an EUV light source device, including: a rotational disk confining a target material by centrifugal force while rotating to generate EUV light through plasma reactions with the target material in the EUV light source device, wherein the rotational disk includes a plurality of rotational disk ribs supporting a rotational disk rim to allow EUV light to penetrate relative to a predetermined area of a light focusing region through a collector mirror, which irradiates the beam emitted from a laser source to the target material by penetrating the beam to the center, receives the EUV light reflected from the target material, and collects the EUV light to the same incident light axis.