EUV Light Distribution via Segmented Dual Optical Paths
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Solution Overview
Problem
Conventional EUV exposure apparatuses face issues with debris mitigation systems that shield EUV light, leading to uneven light intensity and angular distribution, which compromises imaging performance and throughput.
Innovation Solution
The use of a dual optical system comprising a condenser optical system and a supplementary optical system with spheroid and hyperboloid mirrors to uniformly distribute EUV light and enhance light intensity, while avoiding debris shielding.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a debris mitigation system is arranged to remove debris, then debris contamination is reduced, but EUV light is shielded and light intensity is lowered
Solution Approach 1:
The optical system is divided into multiple independent optical paths (first optical path with first mirror, second optical path with second mirror) that operate in parallel. Each path has its own debris mitigation strategy, allowing selective removal of debris while maintaining light transmission through alternative paths, thus resolving the contradiction between debris removal and light intensity preservation.
Solution Approach 2:
The patent introduces an optical integrator as an intermediary component that receives EUV light from multiple optical paths and redistributes it uniformly. This intermediary device allows the system to accept light from various angles and directions, mitigating the shielding effect of debris mitigation systems while maintaining overall light intensity and improving angular distribution uniformity.
2Object-affected harmful factors
If a debris mitigation system is used to remove debris, then debris is removed, but angular distribution becomes uneven and imaging performance deteriorates
Solution Approach 1:
The optical system segments the collection of EUV light into multiple independent paths with different angular ranges. The first optical path collects light from a first angular range while the second optical path collects light from a second angular range. This segmentation allows each path to be optimized for its specific angular range while the overall system achieves uniform angular distribution through combination of all paths.
Solution Approach 2:
The optical integrator serves as an intermediary that receives EUV light from multiple optical paths with different angular distributions and redistributes it uniformly across the entire angular range. This intermediary device corrects the non-uniform angular distribution caused by debris mitigation systems while maintaining debris removal effectiveness.
3Device complexity
If a single optical system is used, then the system is simple, but light intensity and angular distribution are uneven
Solution Approach 1:
The patent merges multiple optical systems (first optical system with first mirror and second optical system with second mirror) into a single integrated optical path combination. These systems are combined such that they collectively provide uniform light intensity and angular distribution across the entire field of view, achieving the benefits of complexity reduction while maintaining performance improvement.
Solution Approach 2:
The optical integrator acts as an intermediary that combines and redistributes light from multiple optical systems into a single unified output with uniform intensity and angular distribution. This intermediary device allows the system to achieve uniform illumination without requiring each individual optical component to be perfectly optimized, thereby reducing overall system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration improves the uniformity of light intensity and angular distribution, increasing throughput and imaging performance by effectively capturing and redirecting EUV light across a broader angular range.
Implementation Method 1
plural reflection optical systems for introducing the X-ray through different optical paths
Implementation Method 2
a unit for generating the plasma, and plural reflection optical systems for introducing the X-ray emitted from the plasma
Data Source
AI summary
An X-ray generator for generating plasma and X-ray emitted from the plasma includes a unit for generating the plasma, and plural reflection optical systems for introducing the X-ray through different optical paths.