EUV Target Collector With High Contact Angle Surface
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Solution Overview
Problem
Current EUV light generation systems face challenges in efficiently collecting and containing targets not irradiated with pulsed laser beams, leading to fragmented materials dispersing outside the target collector, which can deteriorate optical system performance and reduce EUV light power.
Innovation Solution
The EUV light generation apparatus incorporates a target collector with a receiving surface having a contact angle greater than 90 degrees and a collection container, along with a temperature adjusting mechanism, to effectively collect and contain targets not irradiated with the pulsed laser beam, preventing fragmentation and dispersal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional target collector is used to collect non-irradiated targets, then targets can be collected, but fragmented materials disperse outside the collector deteriorating optical system performance
Solution Approach 1:
The receiving surface is designed with a specific three-dimensional configuration including a contact angle of greater than 90 degrees. This geometric dimensionality change creates a surface morphology that causes fragmented materials to be reflected back into the collection container rather than dispersing outward, thus resolving the contradiction between collecting targets and preventing fragmentation dispersal.
Solution Approach 2:
The receiving surface employs a curved or angled geometry with a contact angle greater than 90 degrees. This curvature design redirects the trajectory of incoming targets and their fragments, causing them to bounce back into the collection container. The spherical/curved geometric principle transforms the dispersal direction of fragments from outward to inward, protecting the optical system while maintaining collection efficiency.
2Productivity
If targets are collected in a simple container, then collection is straightforward, but fragmented materials can escape and reduce EUV light power
Solution Approach 1:
By introducing a receiving surface with a contact angle greater than 90 degrees into the collection container, the system adds a dimensional control element that redirects fragmented materials. This geometric feature ensures fragments remain within the container, preventing energy loss through dispersal and maintaining consistent EUV light generation efficiency.
Solution Approach 2:
The invention converts the potentially harmful effect of target fragmentation into a beneficial outcome. By designing the receiving surface with a specific contact angle, the fragments that would normally disperse and cause energy loss are instead redirected back into the collection container. This transforms the harmful fragmentation into a contained phenomenon that does not affect optical system performance or EUV light power.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration prevents the dispersal of fragmented materials outside the target collector, maintaining optical system performance and ensuring consistent EUV light generation by efficiently collecting and containing all targets, thereby enhancing the overall efficiency of the EUV light generation process.
Implementation Method 1
a target collector configured to collect the target which is supplied by the target supply part but is not irradiated with the laser beam in a collection container, by receiving the target on a receiving surface having a contact angle of greater than 90 degrees with the target
Data Source
AI summary
An extreme ultraviolet light generation apparatus may include: a chamber in which extreme ultraviolet light is generated when a target is irradiated with a laser beam inside the chamber; a target supply part configured to supply the target into the chamber; and a target collector configured to collect the target which is supplied by the target supply part but is not irradiated with the laser beam in a collection container, by receiving the target on a receiving surface having a contact angle of greater than 90 degrees with the target.