EUV Light Source Target Diagnostics for Real-Time Trajectory Correction
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Solution Overview
Problem
In laser-produced plasma extreme ultraviolet light sources, existing methods fail to accurately measure and adjust the moving properties of targets in real-time, leading to inefficient interactions and reduced EUV light production due to plasma pushback forces and trajectory deviations.
Innovation Solution
A system and method that utilize diagnostic probes to detect and analyze two-dimensional representations of light interactions with targets before they enter the target space, determining moving properties such as position, velocity, and acceleration, and adjusting radiation pulse characteristics to ensure precise alignment and interaction with the target.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If real-time measurement and adjustment of target moving properties is implemented, then EUV light production efficiency is improved, but device complexity increases
Solution Approach 1:
The system performs preliminary measurement of target moving properties (position, velocity, acceleration) before the target enters the interaction region with the radiation pulse. This advance measurement allows the control system to predict the target's trajectory and adjust the radiation pulse timing and positioning accordingly, ensuring optimal interaction conditions are met and EUV light production efficiency is improved.
Solution Approach 2:
The system implements a feedback loop where diagnostic probes continuously measure the target's moving properties, the control system processes this information, and adjusts the radiation pulse parameters (timing, position) in real-time. This closed-loop feedback mechanism ensures that despite trajectory deviations caused by plasma pushback forces, the radiation pulse consistently intersects the target at the optimal location for maximum EUV light generation.
2Measurement precision
If diagnostic probes are used to detect light interactions before target enters space, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The system uses diagnostic probes as intermediary devices that indirectly measure target properties by detecting light interactions (scattering, absorption, emission) between the target and probe beams. Rather than directly measuring target position and velocity, the probes illuminate the target and detect the modified light, providing precise measurement data about the target's moving properties without requiring direct physical contact or complex positioning systems.
Solution Approach 2:
The system replaces direct mechanical measurement methods with optical-based diagnostic probes. Instead of using mechanical sensors or physical contact devices to measure target properties, the system uses light-matter interactions to non-invasively detect target position, velocity, and acceleration, achieving high measurement precision while avoiding mechanical complexity.
3Manufacturing precision
If radiation pulse characteristics are adjusted based on target properties, then alignment precision is improved, but control system complexity increases
Solution Approach 1:
The control system dynamically adjusts radiation pulse characteristics (timing, position, potentially duration) based on real-time measurements of target moving properties. Rather than using fixed, pre-programmed parameters, the system continuously adapts the radiation pulse delivery to match the actual target trajectory and state, ensuring optimal alignment precision even as target conditions change during operation.
Solution Approach 2:
The system changes key parameters of the radiation pulse (timing relative to target arrival, spatial positioning, and potentially pulse duration or intensity) based on measured target properties. By dynamically modifying these parameters in response to actual target conditions, the system achieves precise alignment between the radiation pulse and target, maximizing EUV light production efficiency.
Data Source
AI summary
A moving property of a target is measured as the target travels toward a target space. The target including a component that emits light when converted to a plasma. A diagnostic probe system is interacted with a current target moving toward the target space. The interaction occurs prior to the current target entering the target space and after an immediately preceding target has interacted with a prior radiation pulse in the target space. First and second light that is produced at least in part from the interaction between the diagnostic probe system and the current target is detected prior to the current target entering the target space and after an immediately preceding target has interacted with the prior radiation pulse in the target space. One or more moving properties of the current target are determined based on an analysis of the detected first and second light.