EUV Target Supply Electrode Segmentation for Velocity Control
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Solution Overview
Problem
Current EUV light generation systems face challenges in increasing the repetition rate of target generation, as higher potential differences between electrodes are needed to enhance target velocity, but this can lead to insulation breakdown and require larger apparatus sizes.
Innovation Solution
The system employs a configuration with a first potential higher than a common potential applied to the first electrode, a second potential lower than the common potential applied to the third electrode, and a third potential between the first and second potentials, increasing the potential difference between the first and second electrodes while suppressing insulation breakdown.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a higher potential difference is applied between electrodes to increase target velocity, then the repetition rate of EUV light generation is improved, but insulation breakdown occurs and apparatus size increases
Solution Approach 1:
The patent divides the single high-voltage electrode into multiple electrodes (first electrode, second electrode, third electrode) with different potentials. The first electrode receives a first potential, the second electrode receives a second potential lower than the first, and the third electrode receives a third potential between the first and second potentials. This segmentation allows the total potential difference to be distributed across multiple stages, increasing target velocity without requiring a single high-voltage connection that would cause insulation breakdown.
Solution Approach 2:
The patent introduces an intermediate potential dimension by adding the third electrode with a potential between the first and second potentials. This creates a stepped potential distribution along the target trajectory, effectively adding a dimensional layer to the voltage application strategy. The multi-level potential structure enables gradual acceleration of targets while keeping individual voltage differences manageable, thus avoiding insulation breakdown issues.
2Productivity
If a higher potential difference is applied between electrodes to increase target velocity, then the repetition rate of EUV light generation is improved, but the apparatus size increases
Solution Approach 1:
The patent segments the voltage application into multiple electrodes positioned along the target trajectory. By distributing the total potential difference across several smaller voltage steps (first potential to second potential, with third potential in between), the apparatus can achieve high target velocity without requiring a single large high-voltage component, thus reducing overall apparatus size while maintaining productivity.
3Speed
If multiple electrodes with different potentials are used to increase target velocity, then the velocity of targets is improved, but the device complexity increases
Solution Approach 1:
The patent uses segmented electrodes with progressively changing potentials to accelerate targets. The first electrode applies a first potential, the second electrode applies a lower second potential, and the third electrode applies an intermediate third potential. This segmentation creates multiple acceleration zones along the target path, increasing target velocity through cumulative effect while distributing the complexity across manageable electrode-staging units.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration increases the velocity of targets traveling to the plasma generation region, enhancing the repetition rate of EUV light generation without increasing insulation breakdown voltage, thus improving system efficiency.
Implementation Method 1
a first power source configured to take a common potential as a reference potential and apply a first potential that is higher than the common potential to the first electrode, a second power source configured to take the common potential as a reference potential and apply a second potential that is lower than the common potential to the third electrode, and a third power source configured to take the common potential as a reference potential and apply a third potential that is no greater than the first potential and is no less than the second potential to the second electrode
Data Source
AI summary
A target supply device may include a receptacle for holding a liquid target material, a first electrode disposed within the receptacle, a nozzle portion provided in the receptacle, a second electrode provided with a first path and disposed facing the nozzle portion, a third electrode provided with a second path that, along with the first path, defines a trajectory of the liquid target material released from the nozzle portion, a first power source that applies a first potential that is higher than a common potential to the first electrode, a second power source that applies a second potential that is lower than the common potential to the third electrode, and a third power source that applies a third potential that is no greater than the first potential and is no less than the second potential to the second electrode.