EUV Target Supply Filter Coating for Particle Prevention
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Solution Overview
Problem
Current target supply devices for EUV light generation systems face challenges in preventing filter damage and particle production due to the reaction of liquid target materials with glass filters, leading to clogged nozzle holes and reduced efficiency.
Innovation Solution
A target supply device with a glass filter that generates a solid reaction product and a support member with a larger bore diameter to accommodate the liquid target material, along with a coating film on the filter's inner surface to prevent reaction with the target material, ensuring the filter's integrity and maintaining nozzle flow.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a glass filter is used in the target supply device, then the filter can effectively filter the liquid target material, but the glass reacts with the liquid target material causing filter damage and particle production
Solution Approach 1:
A coating layer is applied on the inner surface of the glass filter to serve as an intermediary between the glass and liquid target material. This coating layer prevents direct contact and chemical reaction between the glass filter and liquid target material, eliminating particle production while maintaining the filter's integrity and functionality
Solution Approach 2:
The filter structure is transformed from a single material (glass) to a composite structure consisting of glass substrate with a protective coating layer. This composite structure combines the filtering capability of glass with the chemical inertness of the coating material, resolving the contradiction between filtration effectiveness and chemical reactivity
2Productivity
If the filter bore diameter is reduced to maintain flow control, then the target material flow is controlled, but the filter becomes more susceptible to damage and clogging
Solution Approach 1:
The coating layer is applied in advance on the filter inner surface to prevent the harmful reaction before it can occur. This preliminary protective measure prevents filter damage and clogging, allowing the filter to maintain its small bore diameter for flow control without compromising durability
3Ease of operation
If a support member with larger bore diameter is added to prevent clogging, then the device structure is simplified and maintenance is easier, but the device complexity increases
Solution Approach 1:
The support member is designed as a separate, removable component with a through-hole structure. This segmentation allows the support member to be independently installed, maintained, or replaced without affecting the filter, simplifying maintenance operations while keeping the overall device structure manageable through modular design
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents filter damage and particle production, ensuring stable operation and maintaining the flow of target material through the nozzle, enhancing the efficiency of EUV light generation systems.
Implementation Method 1
an inner surface of the first through-hole is coated with a material which is not easy to react with the liquid target material
Implementation Method 2
a first through-hole configured to allow the liquid target material to pass therethrough, and the support member may include a second through-hole having a bore diameter greater than a bore diameter of the first through-hole to allow the liquid target material flowing out of the first through-hole to flow therethrough
Data Source
AI summary
A target supply device may include: a target generator configured to accommodate a liquid target material and having a nozzle with a nozzle hole from which the liquid target material is outputted; and a filter disposed in the target generator and made of glass, the glass reacting with the liquid target material, so that a solid reaction product is generated. The filter may include a first through-hole configured to allow the liquid target material to pass therethrough, and an inner surface of the first through-hole may be coated with a material which is not easy to react with the liquid target material.