EUV Target Supply Heater Insulation via Intermediary
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Solution Overview
Problem
Existing target supply devices for EUV light generation systems face challenges in electrical insulation, requiring significant effort, time, and cost to ensure the entire device is electrically insulated, which complicates the heating and temperature control processes.
Innovation Solution
The target supply device incorporates a tank, nozzle, and heater with an insulating member, where the heater is separated from the tank and heats it through the insulating member, allowing for direct connection to a three-phase power source without needing an insulation transformer, and uses an optical fiber for temperature sensing to reduce insulation requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If the heater is directly connected to the tank, then heating efficiency is improved, but electrical insulation becomes difficult to achieve
Solution Approach 1:
The patent introduces an insulating member as an intermediary between the heater and the tank. The heater is disposed around the insulating member, which in turn contacts the tank, allowing thermal energy to be transferred while maintaining electrical insulation. This mediator structure enables both heating functionality and electrical isolation simultaneously.
2Reliability
If the entire device is electrically insulated, then safety is improved, but device complexity and cost increase
Solution Approach 1:
The patent extracts the insulation function from the entire device structure and concentrates it specifically at the heater-tank interface using a localized insulating member. This selective approach provides necessary electrical safety only where needed (around the heater) rather than insulating the entire device, thereby reducing overall complexity and cost.
3Reliability
If insulation transformers are used for heating, then electrical insulation is achieved, but time and cost increase
Solution Approach 1:
The insulating member serves as a physical intermediary that provides electrical isolation without requiring insulation transformers. This direct structural solution eliminates the need for complex electrical insulation equipment, reducing both installation time and operational complexity while maintaining electrical safety.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration simplifies the electrical insulation and heating processes, reducing costs and complexity while maintaining effective temperature control, allowing for efficient operation of the target supply device.
Implementation Method 1
The heater may be separated from the tank and heat the tank via the insulating member
Data Source
AI summary
A target supply device 4 may include a tank 51, formed of a metal, that holds a target material, an insulating member 62 that makes contact with at least part of the periphery of the tank 51, and a heater 58 that is separated from the tank 51 and heats the tank 51 via the insulating member 62.