EUV Target Replacement Trolley Linear Mechanism
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current EUV light generation devices face challenges in extending operation time and increasing power due to limitations in target material capacity and debris management, leading to difficulties in replacing the target generation device, especially with increased weight and complexity.
Innovation Solution
A target generation device replacement system utilizing a trolley with a linear movement mechanism and positioning portion to facilitate the detachment and reattachment of the target generation device to the chamber, allowing for easier handling and replacement without manual lifting, even with increased tank capacity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of moving object
If the target material capacity is increased to extend operation time, then the operation duration is improved, but the weight of the target generation device increases making manual handling difficult
Solution Approach 1:
The system divides the target generation device into separable components: the target material supply device and the chamber. The target material supply device can be detached and replaced independently, allowing the heavy target material tank to be exchanged without moving the entire chamber assembly. This segmentation enables extended operation time through larger target material capacity while avoiding the need to manually handle the complete heavy assembly.
Solution Approach 2:
A linear movement mechanism serves as an intermediary device between the operator and the heavy target generation device. This mechanism automates the positioning and attachment/detachment operations, eliminating the need for manual lifting and handling of the heavy device. The intermediary mechanism bridges the gap between the operator's limited capacity and the heavy device's weight, enabling safe and efficient replacement operations.
2Ease of operation
If the target generation device is designed for easy replacement, then the ease of operation is improved, but the device complexity increases due to additional mechanisms
Solution Approach 1:
The target generation device is designed with self-aligning features and automatic positioning capabilities. The linear movement mechanism automatically positions the target material supply device relative to the chamber, and the attachment mechanism self-secures the connection without requiring complex manual alignment procedures. This self-service approach simplifies the replacement operation while minimizing the need for overly complex positioning and alignment mechanisms.
3Device complexity
If manual handling is used for replacement, then the device complexity is reduced, but the productivity decreases due to operational downtime
Solution Approach 1:
The system replaces manual mechanical handling with an automated linear movement mechanism that provides controlled positioning and movement. This substitution enables faster and more precise replacement operations compared to manual handling, reducing operational downtime. The mechanism includes automated attachment and detachment functions that operate more quickly and consistently than manual procedures, thereby improving productivity while maintaining reasonable system complexity.
Data Source
AI summary
A target generation device replacement trolley includes: A. a linear movement mechanism configured to hold a target generation device configured to output a target material and linearly move the target generation device in a direction in which the target material is output; and B. a positioning portion configured to position the linear movement mechanism relative to a mounting part of a chamber on which the target generation device is mounted. The target generation device replacement trolley further includes C. a drive unit configured to drive the linear movement mechanism. The target generation device replacement trolley further includes D. a mount configured to hold the linear movement mechanism. The positioning portion is provided to the mount.