EUV Target Trajectory Detection and Actuator Control
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Solution Overview
Problem
Current extreme ultraviolet (EUV) light generation systems face challenges in accurately detecting and adjusting the trajectory of targets during EUV light generation, leading to potential misalignment and reduced productivity due to the inability to detect targets in one of the two detection axes, necessitating operator intervention and extended startup times.
Innovation Solution
The system incorporates a processor-controlled actuator and sensors to perform detection adjustments by changing the target's trajectory when detected by one sensor but not the other, using a first search and second search mechanism based on signal intensity to determine optimal alignment and minimize operator intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the system uses two trajectory sensors to detect the target position, then the measurement precision is improved, but the device complexity increases and startup time increases due to alignment adjustments
Solution Approach 1:
The system performs preliminary trajectory detection using the first sensor before activating the second sensor. The processor determines whether the target trajectory passes through the detection range of the second sensor based on first sensor data, and only then activates the second sensor for verification. This preliminary action approach reduces the complexity of simultaneous multi-sensor coordination and simplifies the startup alignment process.
2Measurement precision
If the system performs manual alignment adjustments by operators, then the measurement precision can be improved, but the productivity decreases and startup time increases
Solution Approach 1:
The system performs self-alignment by automatically determining whether the target trajectory passes through the detection range of the second sensor based on data from the first sensor. The processor controls the activation and deactivation of sensors without operator intervention, enabling the system to self-adjust and maintain optimal detection conditions. This eliminates manual alignment operations and significantly reduces startup time while maintaining high measurement precision.
3Reliability
If the system activates both sensors simultaneously, then the measurement reliability is improved, but the productivity decreases due to extended warm-up and alignment time
Solution Approach 1:
The system employs periodic sensor activation rather than continuous simultaneous operation. The processor periodically determines whether the target trajectory passes through the second sensor's detection range based on first sensor data, and only activates the second sensor when needed. This periodic activation maintains detection reliability by verifying trajectory alignment when necessary while significantly improving productivity by reducing unnecessary sensor operation time and extending system operational efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables continuous operation of the EUV light generation system without the need for operator readjustment, reducing startup time and increasing productivity by ensuring accurate detection and alignment of the target trajectory on both detection axes.
Implementation Method 1
a first trajectory sensor configured to detect the trajectory of the target in a first direction
Implementation Method 2
a second trajectory sensor configured to detect the trajectory of the target in a second direction being different from the first direction
Implementation Method 3
an actuator configured to change a trajectory of the target
Implementation Method 4
configured to generate extreme ultraviolet light by irradiating a target with laser light
Data Source
AI summary
An extreme ultraviolet light generation apparatus may include a target supply unit configured to output a target; an actuator configured to change a trajectory of the target; an illumination device configured to illuminate the target; a first trajectory sensor configured to detect the trajectory in a first direction; a second trajectory sensor configured to detect the trajectory in a second direction; and a processor configured, when the trajectory of the target is detected by the first trajectory sensor but is not detected by the second trajectory sensor, to perform a first search and determine whether or not to repeat the first search based on a signal intensity of the first trajectory sensor, the first search including changing the trajectory of the target into a third direction by controlling the actuator, and then determining whether or not the second trajectory sensor is capable of detecting the trajectory of the target.