EUV Target Supply Device Temperature Feedback Control
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Solution Overview
Problem
Current extreme ultraviolet (EUV) light generation systems face instability in EUV light emission due to thermal disturbances such as radiation heat and gas convection, affecting droplet connection and overall EUV light generation efficiency.
Innovation Solution
A target supply device with a piezoelectric unit temperature feedback control system that maintains a constant temperature of the vibration propagation path, using a chiller unit and temperature sensors to stabilize the piezoelectric unit temperature, and optionally incorporating a plasma shielding plate to reduce thermal disturbances.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If a laser beam is used to generate plasma for EUV light production, then extreme ultraviolet light can be generated, but thermal disturbances such as radiation heat and gas convection cause instability in droplet connection and EUV light emission
Solution Approach 1:
The patent implements a feedback control system that includes temperature sensors to detect temperature changes in the vibration propagation path and a control unit that adjusts the vibration element's operation based on detected temperature. This feedback mechanism compensates for thermal disturbances caused by laser beam irradiation and plasma generation, maintaining stable droplet connection and EUV light emission despite the harsh thermal environment
Solution Approach 2:
The patent dynamically adjusts vibration parameters (frequency, amplitude) of the vibration element based on detected temperature changes in the vibration propagation path. By changing these parameters in response to thermal conditions, the system maintains optimal droplet formation and connection stability even under varying thermal disturbances from laser irradiation and plasma generation
2Productivity
If the vibration propagation path is exposed to plasma and laser beam, then droplet generation can occur, but temperature fluctuations affect vibration element performance and droplet connection
Solution Approach 1:
Temperature sensors positioned in the vibration propagation path provide real-time temperature data to a control unit, which adjusts the vibration element's operation parameters accordingly. This feedback loop compensates for temperature-induced performance variations, ensuring consistent droplet generation rates and connection quality despite exposure to plasma and laser beam heating
Solution Approach 2:
The patent replaces purely mechanical vibration delivery with a controlled system that uses electric signals to drive the vibration element, allowing dynamic adjustment of vibration characteristics based on temperature feedback. This substitution enables electronic control and compensation that is not possible with fixed mechanical systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system stabilizes droplet connection and EUV light emission by maintaining a constant piezoelectric unit temperature, enhancing the stability and accuracy of EUV light generation despite thermal disturbances.
Implementation Method 1
a piezoelectric element that generates vibration in the nozzle by applying an electric signal thereto
Implementation Method 2
a chiller unit that circulates a refrigerant to a component forming the vibration propagation path in order to control a temperature of the vibration propagation path
Data Source
AI summary
A target supply device according to an aspect of the present disclosure includes a tank in which a target substance in a liquid form is housed, a vibration element configured to generate a droplet of the target substance by providing, through a vibration propagation path, vibration to the target substance output through the nozzle, a first temperature adjustment mechanism configured to adjust a temperature of a refrigerant to be supplied to the vibration propagation path component to a first temperature, a temperature sensor configured to detect a temperature of the vibration propagation path, a second temperature adjustment mechanism configured to adjust, to a second temperature, the temperature of the vibration propagation path to which the refrigerant is supplied, and a control unit configured to control the second temperature adjustment mechanism based on an output from the temperature sensor.