EUV Target Supply Device Oxygen Precipitation Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In the production of semiconductor devices with feature sizes of 32 nm or less, existing EUV light generation systems face challenges in managing oxygen dissolved in target materials, leading to precipitation of metal oxides that can clog or narrow nozzle holes, affecting the efficiency and reliability of the process.
Innovation Solution
A target supply device with a tank, nozzle, filter, and temperature adjuster, controlled by a controller, is used to change the temperature of the target material to precipitate oxygen as metal oxide, which is then filtered out, preventing clogging and ensuring smooth operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the target material is heated to precipitate oxygen as metal oxide, then the oxygen removal efficiency is improved, but the metal oxide may clog or narrow the nozzle hole
Solution Approach 1:
The system divides the target material processing into two separate locations: precipitation occurs in the tank while filtration occurs at the nozzle. The filter structure segments the flow path to capture metal oxide particles before they reach the nozzle hole, resolving the contradiction between oxygen removal and nozzle clogging prevention
Solution Approach 2:
A filter is introduced as an intermediary component between the target material tank and the nozzle. This filter acts as a mediator that allows liquid target material to pass while blocking solid metal oxide particles, enabling oxygen precipitation without nozzle clogging
2Productivity
If the temperature is increased to precipitate metal oxide, then the precipitation efficiency is improved, but the energy consumption increases
Solution Approach 1:
The system performs preliminary oxygen precipitation in the tank before the material reaches the nozzle. By advancing the precipitation process to occur earlier in the flow path, the system achieves effective oxygen removal at lower temperatures compared to attempting precipitation at the nozzle stage
Solution Approach 2:
The system optimizes the temperature parameter at different locations: maintaining higher temperature in the tank to promote precipitation, then allowing cooling in the communication portion to facilitate filterable oxide formation. This parameter optimization balances precipitation efficiency with energy consumption
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents metal oxide precipitation in the nozzle, maintaining the integrity and efficiency of the EUV light generation process, allowing for continuous operation without clogging issues.
Implementation Method 1
The temperature adjuster may be configured to change a temperature of the target material in the tank
Implementation Method 2
The controller may be configured to control the temperature adjuster to change the temperature of the target material in the tank so as oxygen dissolved in the target material to precipitate as metal oxide
Implementation Method 3
The filter may be disposed in a communication portion for conducting the target material from the tank to the nozzle hole
Data Source
AI summary
A target supply device may be provided with a tank configured to contain a metal as a target material, a nozzle having a nozzle hole through which the target material is output from the tank, a filter disposed in a communication portion for conducting the target material from the tank to the nozzle hole, a temperature adjuster configured to change the temperature of the target material in the tank, and a controller controlling the temperature adjuster to change the temperature of the target material in the tank such that oxygen in the target material is precipitated as metal oxide.