EUV Light Generation Target Trajectory Control
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Solution Overview
Problem
Current extreme ultraviolet light generation apparatuses face challenges in maintaining efficient operation when the target trajectory is not detected by both X-axis and Z-axis trajectory sensors, leading to reduced productivity due to the need for operator intervention and extended startup times.
Innovation Solution
The apparatus includes a target supply unit, an actuator, and sensors to detect and control the target trajectory, enabling trajectory control to ensure detection by both sensors, thereby allowing automatic operation and reducing the need for manual adjustments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the apparatus uses multiple trajectory sensors to detect target position, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The detection system is segmented into two independent trajectory sensors: a first sensor for detecting trajectory in a first direction and a second sensor for detecting trajectory in a second direction. This segmentation allows each sensor to specialize in one detection direction, improving overall measurement precision while keeping individual sensor complexity manageable
Solution Approach 2:
The control unit is designed with multi-functionality, capable of performing different control strategies: normal control when both sensors detect the target, and trajectory control when only one sensor detects the target. This universality allows the system to adapt to various operational conditions without requiring separate control systems
2Ease of operation
If the apparatus performs automatic trajectory control, then ease of operation is improved, but device complexity increases
Solution Approach 1:
The control unit is pre-programmed with decision logic that automatically determines whether normal control or trajectory control should be applied based on sensor detection status. This preliminary action eliminates the need for operator intervention in mode selection, improving ease of operation
Solution Approach 2:
The system implements feedback control by continuously monitoring the detection status from both trajectory sensors and automatically adjusting the control strategy accordingly. When the target is detected by only one sensor, the system switches to trajectory control mode, and when detected by both sensors, it switches to normal control mode, creating a closed-loop automatic control system
3Reliability
If the apparatus implements dual-sensor detection requirement, then reliability is improved, but productivity decreases
Solution Approach 1:
The control mode is made dynamic rather than static. The system can switch between normal control mode and trajectory control mode based on real-time sensor detection status. This dynamic adaptation allows the system to maintain reliability requirements while minimizing startup time by using the simpler normal control mode when conditions permit
Solution Approach 2:
The system changes the control parameter (control mode) based on detection conditions. When both sensors detect the target, the system operates in normal control mode with faster startup. When only one sensor detects the target, it switches to trajectory control mode to ensure reliable detection, thus optimizing the balance between reliability and productivity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables the EUV light generation apparatus to operate without operator intervention, improving productivity by ensuring the target trajectory is correctly aligned and detected, even when initially undetected by one sensor axis, thus enhancing the apparatus's efficiency and reliability.
Implementation Method 1
a first trajectory sensor configured to detect the trajectory of the target in a first direction
Implementation Method 2
a second trajectory sensor configured to detect the trajectory of the target in a second direction being different from the first direction
Implementation Method 3
an actuator configured to shift a trajectory of the target
Implementation Method 4
generate extreme ultraviolet light by irradiating a target with laser light
Data Source
AI summary
An extreme ultraviolet light generation apparatus is an apparatus to generate extreme ultraviolet light by irradiating a target with laser light, and may include a target supply unit configured to output the target, an actuator configured to shift a trajectory of the target, a first trajectory sensor configured to detect the trajectory of the target in a first direction, a second trajectory sensor configured to detect the trajectory of the target in a second direction being different from the first direction, and a control unit configured to perform trajectory control including controlling the actuator to cause the second trajectory sensor to be capable of detecting the trajectory of the target when the trajectory of the target has been detected by the first trajectory sensor and has not been detected by the second trajectory sensor.