EUV Light Generation Target Trajectory Detection
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Solution Overview
Problem
In extreme ultraviolet light generation for semiconductor production, existing systems face challenges in accurately detecting the trajectory of targets due to image blurring, which affects the precision of plasma generation and EUV light production, especially at finer feature sizes required for next-generation semiconductor fabrication.
Innovation Solution
The proposed extreme ultraviolet light generation apparatus includes a target detection section with image sensors and processing units that calculate the center of gravity or center positions of optical intensity distributions to accurately determine the target's actual path, even if the image becomes blurred, using a chamber with a conducting optical system and a target supply device to irradiate the target with a pulse laser beam at a plasma generation region.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a pulse laser beam is used to irradiate the target for plasma generation, then EUV light can be generated, but the image of the target becomes blurred making trajectory detection difficult
Solution Approach 1:
The patent applies preliminary action by capturing images of the target at multiple time points before the laser irradiation occurs. This allows the trajectory to be determined based on the sequence of images taken during the target's movement, before the plasma generation event obscures the target. The processing unit calculates the trajectory by analyzing the positional changes of the target across these pre-captured images.
2Manufacturing precision
If the target is moved quickly to achieve precise positioning, then plasma generation precision improves, but image blurring increases
Solution Approach 1:
The system captures images at multiple time points during the target's movement before irradiation. By analyzing the sequence of images, the processing unit can determine the trajectory even when the target moves quickly, as the images are taken throughout the movement process rather than after the fact.
Solution Approach 2:
The patent employs dynamic image capture at multiple time points during the target's motion. Instead of a single static image, the system captures a sequence of images that dynamically record the target's position changes, allowing trajectory calculation that accounts for the motion blur present in each individual image.
3Device complexity
If a single image is used for target detection, then the detection process is simple, but trajectory accuracy is insufficient
Solution Approach 1:
The patent segments the detection process into multiple image captures at different time points. Instead of relying on a single image, the system divides the detection task into capturing multiple frames during the target's movement, then processes these segmented images separately to determine the trajectory through positional changes.
Solution Approach 2:
Multiple images are captured in advance during the target's movement before the laser irradiation. This preliminary capture of multiple frames provides sufficient data for trajectory calculation without requiring complex real-time processing during the actual plasma generation event.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables accurate detection and tracking of the target's trajectory, ensuring precise plasma generation and EUV light production, even when images become blurred, thereby supporting the production of semiconductor devices with feature sizes of 32 nm or less.
Implementation Method 1
a pulse laser beam is irradiated at a target in a plasma generation region
Implementation Method 2
plasma is generated by irradiating a target material with a laser beam
Implementation Method 3
an image of the target is formed on a light-receiving unit by transfer optics
Data Source
AI summary
In an extreme ultraviolet light generation apparatus, a target detection section may include a light source, a transfer optical system, an image sensor configured to output image data of an image that has been formed by irradiating a target outputted from a target supply device with light outputted from the light source on a light-receiving unit of the image sensor by the transfer optical system, and a processing unit, connected to the image sensor, configured to receive the image data, obtain a first optical intensity distribution along a first line that intersects with a trajectory of the target and a second optical intensity distribution along a second line that intersects with the trajectory, calculate a center of gravity position in the first optical intensity distribution and a center of gravity position in the second optical intensity distribution, and calculate an actual path of the target based on the calculated positions.