EUV Target Trajectory Control via Nozzle Adjustment
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Solution Overview
Problem
In LPP EUV light sources, the trajectory of droplet targets is difficult to accurately control due to thermal deformation and wear of the target injection nozzle, leading to deviations in the injection direction and position, which affects the stability and efficiency of EUV light generation.
Innovation Solution
An apparatus and method for measuring and controlling the target trajectory, including a nozzle adjustment mechanism, a target trajectory measuring unit, and a nozzle adjustment controller, to adjust the position and angle of the target injection nozzle based on measured trajectory deviations, ensuring the droplet target passes through a predetermined position for precise plasma generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the droplet target diameter is reduced to improve resolution and reduce debris, then manufacturing precision and purity are improved, but the trajectory control difficulty increases and stability deteriorates
Solution Approach 1:
The system employs a feedback control mechanism where the trajectory measuring unit continuously monitors the droplet target trajectory, and the nozzle adjustment controller automatically adjusts the nozzle position and angle based on measured deviations. This closed-loop feedback system maintains stable trajectory control even when droplet diameter is reduced to improve resolution and reduce debris.
Solution Approach 2:
The patent replaces manual or open-loop mechanical adjustment with an automated control system that uses trajectory measurement data to drive nozzle adjustments. This substitution of mechanical control with an integrated measurement-control system enables precise trajectory management for smaller droplets that are more sensitive to positioning errors.
2Productivity
If the target injection nozzle is operated for extended periods to improve productivity, then output is improved, but thermal deformation and wear increase causing trajectory deviation
Solution Approach 1:
The feedback control system continuously monitors trajectory deviations caused by thermal deformation and wear, and automatically compensates by adjusting the nozzle position and angle. This enables extended operation periods while maintaining trajectory accuracy, thus improving productivity without sacrificing precision.
Solution Approach 2:
The system dynamically adjusts the nozzle characteristics in real-time based on actual trajectory performance. As the nozzle undergoes thermal deformation and wear during extended operation, the control system adapts the nozzle position and angle to compensate for these changes, maintaining consistent trajectory accuracy throughout the operational lifecycle.
3Manufacturing precision
If the nozzle adjustment mechanism is added to correct trajectory deviations, then trajectory accuracy is improved, but device complexity increases
Solution Approach 1:
The nozzle adjustment mechanism serves multiple functions: it corrects trajectory deviations caused by thermal deformation, compensates for wear effects, and adapts to variations in droplet ejection characteristics. This multi-functionality justifies the added complexity by addressing multiple sources of trajectory error with a single integrated system.
4Manufacturing precision
If the target trajectory measuring unit and control system are implemented, then trajectory control precision is improved, but ease of operation decreases
Solution Approach 1:
The system operates autonomously by self-measuring the trajectory and self-adjusting the nozzle characteristics without requiring manual intervention. The measuring unit and control system work together to automatically correct trajectory deviations, improving precision while maintaining ease of operation through automation rather than manual control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables stable and efficient EUV light generation by accurately aligning the droplet target with the plasma generation position, improving the uniformity of intensity distribution and energy stability of the EUV light, even when the droplet target diameter is reduced, and minimizing debris production.
Implementation Method 1
a target delivery mechanism for heating and melting the target material and ejecting it to a target position
Implementation Method 2
heating and melting the target material and ejecting it
Implementation Method 3
irradiating a droplet target supplied from a target injection nozzle with a driver laser beam
Implementation Method 4
the target material is excited and turned into plasma. From the plasma, various wavelength components including EUV light are radiated
Implementation Method 5
extremely high intensity close to black body radiation can be obtained because plasma density can be considerably made larger
Implementation Method 6
EUV light is reflected and collected by using an EUV collector mirror for highly reflecting a specific wavelength component
Data Source
AI summary
An apparatus for measuring and controlling a target trajectory within a chamber apparatus for generating extreme ultraviolet light from plasma generated by irradiating a droplet target supplied from a target injection nozzle with a driver laser beam from an external driver laser. The apparatus includes: a nozzle adjustment mechanism for adjusting at least one of a position and an angle of the target injection nozzle; a target trajectory measuring unit for measuring a target trajectory to obtain trajectory information on the target trajectory; a target trajectory angle detecting unit for obtaining a value related to an angle deviation between the target trajectory represented by the trajectory information and a predetermined target trajectory; and a nozzle adjustment controller for controlling the nozzle adjustment mechanism based on the value related to the angle deviation such that the droplet target passes through a predetermined laser beam irradiation position.