EUV Radiation Source Vacuum Insulation for Electrode Life
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Solution Overview
Problem
Existing EUV radiation sources with gas discharge plasma face challenges in achieving long electrode life and high efficiency due to premature insulator failure and reduced efficiency from large plasma dimensions, which are not adequately addressed by current ceramic insulator configurations.
Innovation Solution
A cylindrically symmetric arrangement with annular vacuum insulation areas and a pre-ionization system using a projecting tubular insulator to minimize electron arcing, combined with magnetic fields to enhance dielectric strength and prevent electrode erosion, allowing for efficient generation of EUV radiation with extended electrode life.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of stationary object
If ceramic insulator tubes are added to limit electrode erosion, then electrode lifetime is improved, but insulator reliability deteriorates due to cracking and metallization at high pulse repetition frequencies
Solution Approach 1:
The invention extracts the insulator material from the discharge area by providing vacuum insulation between the electrodes, eliminating the ceramic insulator tubes that were previously necessary to limit electrode erosion. This removes the source of insulator failure while maintaining electrode protection through the vacuum barrier.
Solution Approach 2:
The invention creates an inert vacuum environment between the electrodes to prevent electron arcing and eliminate the need for ceramic insulators. The vacuum acts as an inert barrier that prevents harmful interactions between electrode material and insulator material, solving both the electrode erosion and insulator reliability problems simultaneously.
2Length of moving object
If large interelectrode distances are used to reduce plasma dimensions, then plasma size is improved, but radiation efficiency deteriorates due to reduced collector optics efficiency
Solution Approach 1:
The invention changes the physical state parameter of the medium between electrodes from atmospheric pressure to vacuum. This parameter change allows for larger interelectrode distances without increasing plasma dimensions excessively, as the vacuum environment confines the plasma more effectively. The result is improved plasma dimension control while maintaining radiation efficiency through optimized collector optics geometry.
3Reliability
If vacuum insulation is used instead of ceramic insulators, then insulator reliability is improved, but electron arcing suppression becomes challenging without adequate dielectric strength
Solution Approach 1:
The invention uses vacuum as an inert environment that inherently provides dielectric strength to suppress electron arcing. The vacuum barrier between electrodes prevents charge carrier formation and electron multiplication, providing natural arcing suppression without requiring additional insulator materials. This maintains high reliability while avoiding the cracking and metallization problems of ceramic insulators.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly increases the lifetime of the electrode system while maintaining high efficiency of the radiation source, achieving stable EUV radiation generation with reduced electrode wear and improved dielectric strength.
Implementation Method 1
exclusively suitably shaped vacuum insulation areas which have the shape of an annular gap and which are formed depending on the product of the gas pressure and the interelectrode distance of the cathode and anode for reliable suppression of electron arcing are provided for insulating the cathode and anode from one another
Implementation Method 2
a pre-ionization of the work gas takes place between coaxial electrodes as a sliding discharge on ceramic surfaces which emits UV radiation and fast electrons
Implementation Method 3
a sliding discharge on ceramic surfaces which emits UV radiation and fast electrons
Implementation Method 4
a very hot (kT>30 eV), dense plasma is formed locally as a result of the magnetic forces and dissipated power in the ionized gas
Implementation Method 5
a very hot (kT>30 eV), dense plasma is formed locally as a result of the magnetic forces and dissipated power in the ionized gas
Implementation Method 6
the ionized gas is conducted through an axial aperture of one of the electrodes in the gas discharge area, where it ignites the main discharge
Data Source
AI summary
The invention is directed to an arrangement for the generation of intensive short-wavelength radiation based on a gas discharge plasma. It is the object of the invention to find a novel possibility for generating intensive short-wavelength radiation, particularly EUV radiation, based on a gas discharge plasma which achieves a long life of the electrode system along with a high total efficiency of the radiation source without substantially increasing the dimensions of the discharge unit. This object is met, according to the invention, in that exclusively suitably shaped vacuum insulation areas which have the shape of an annular gap and which are formed depending on the product of gas pressure (p) and interelectrode distance (d) between the cathode and anode are provided for insulating the cathode and anode from one another in a cylindrically symmetric electrode arrangement for reliable suppression of electron arcing.