EUV Source Vane Heating for Tin Clogging Control
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Solution Overview
Problem
EUV lithography systems face issues with tin clogging and contamination of the collector due to non-uniform temperature distribution in the vessel, leading to reduced performance and increased maintenance downtime.
Innovation Solution
A proactive thermal control system with segmented thermal control elements provides localized climate control to maintain stable vessel temperatures, detecting and adjusting parameters to balance temperature variations and minimize tin accumulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If thermal control elements are used to maintain vessel temperature, then temperature stability is improved, but device complexity increases
Solution Approach 1:
The thermal control system is divided into multiple independently controllable thermal control elements distributed around the vessel. Each element can be individually controlled to address local temperature variations, allowing precise temperature management without requiring a completely complex centralized system. The segmentation enables modular control that scales with the vessel size and temperature requirements.
Solution Approach 2:
Different regions of the vessel receive differentiated thermal control through locally positioned thermal control elements. Each element adjusts temperature in its specific zone based on local conditions, such as proximity to the EUV source or collector, rather than applying uniform temperature control throughout. This local quality approach optimizes temperature stability where most needed while reducing unnecessary control complexity in other areas.
2Stability of the object's composition
If segmented thermal control elements are used for localized control, then temperature uniformity is improved, but manufacturing complexity increases
Solution Approach 1:
The thermal control elements are designed as modular segments that can be manufactured independently and then assembled into the complete thermal control system. This segmentation allows each element to be produced using standard manufacturing processes, and the modular design simplifies quality control and assembly compared to manufacturing a single complex integrated thermal control system.
Solution Approach 2:
The thermal control elements are designed with universal characteristics that allow them to perform multiple functions: heating, cooling, and temperature sensing. Each element can be configured for different operational modes and can be applied to various positions in the vessel, reducing the need for custom-designed components for each location and thereby simplifying manufacturing.
3Reliability
If proactive thermal control is implemented to detect and adjust temperature variations, then tin clogging is reduced, but system complexity increases
Solution Approach 1:
The thermal control system proactively detects temperature variations and adjusts thermal control element operation before tin accumulation can occur. By continuously monitoring temperature and making preemptive adjustments, the system prevents the conditions that lead to tin clogging rather than reacting after problems arise, thereby improving reliability without requiring complex intervention mechanisms.
Solution Approach 2:
The thermal control system incorporates feedback loops that continuously monitor temperature conditions and automatically adjust thermal control element operation in response. This feedback mechanism enables the system to self-regulate and maintain optimal temperatures that prevent tin clogging, reducing the need for complex external control systems or manual intervention while improving reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively reduces tin clogging and contamination, ensuring sustained EUV source performance and reducing downtime by maintaining a stable temperature environment within the vessel.
Implementation Method 1
a first heating element in a first vane segment of a vane included in an EUV radiation source that generates the EUV radiation is selectively activated or deactivated based on a setpoint temperature
Implementation Method 2
A proactive thermal control system with segmented thermal control elements provides localized climate control to maintain stable vessel temperatures, detecting and adjusting parameters to balance temperature variations
Data Source
AI summary
An extreme ultraviolet (EUV) source includes a collector associated with the vessel. The extreme ultraviolet (EUV) source includes a plurality of vanes along walls of the vessel. Each vane includes a stacked vane segment, and the stacked vane segments for each vane are stacked in a direction of drainage of tin (Sn) in the vessel. The EUV source includes a thermal control system comprising a plurality of independently controllable heating elements, where a heating element is configured to provide localized control for heating of a vane segment of the stacked vane segments.