Rotatable EUV Source Vessel Debris Management
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Solution Overview
Problem
The existing EUV radiation sources face issues with collector contamination due to fuel debris accumulation, requiring frequent replacement and disrupting the generation process, as well as potential explosions in hydrogen atmospheres when tin debris reacts with hydrogen.
Innovation Solution
A rotatable EUV source vessel with a heating area on its inner surface, coordinated with rotation speed, to reflow and collect fuel debris, preventing contamination of the collector and minimizing explosion risks by directing debris away from the collector and into a debris-collection element.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If fuel debris is not actively managed, then the EUV source vessel accumulates debris over time, but this leads to collector contamination and frequent replacements
Solution Approach 1:
The patent applies preliminary action by implementing a debris management system (heating area and rotation mechanism) that proactively prevents fuel debris from reaching the collector before contamination occurs. The debris is continuously redirected to the heating area during normal operation, eliminating the need for frequent collector replacements and enabling continuous EUV radiation generation.
2Quantity of substance
If tin debris reacts with hydrogen atmosphere, then fuel debris is generated, but this creates explosion risks
Solution Approach 1:
The patent converts the potentially harmful fuel debris into a beneficial managed byline. Instead of allowing debris to accumulate and create explosion risks, the system uses controlled heating to manage the debris in a way that prevents hazardous reactions while maintaining EUV generation. The heating area serves to control and redirect debris rather than allow uncontrolled accumulation.
3Device complexity
If the EUV source vessel is stationary, then the structure is simple, but fuel debris accumulates on the inner surface and contaminates the collector
Solution Approach 1:
The patent applies dynamics by introducing rotation capability to the EUV source vessel. The vessel rotates to dynamically redirect fuel debris toward the heating area, preventing static accumulation on the inner surface. This rotational movement, combined with localized heating, creates a dynamic debris management system that maintains cleanliness without requiring complex additional components.
4Reliability
If collector replacement is performed frequently, then collector contamination is prevented, but the generation process is disrupted
Solution Approach 1:
The patent implements continuity of useful action by maintaining constant debris redirection to the heating area throughout the EUV generation process. This continuous passive management ensures the collector remains clean without interrupting the radiation generation, allowing the system to operate continuously at full capacity without scheduled maintenance interruptions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution allows continuous EUV radiation generation without collector contamination and reduces the risk of explosions by reflowing debris to a controlled heating area, improving yield and operational efficiency.
Implementation Method 1
a laser beam hits the fuel droplets and heats the fuel droplets to a critical temperature
Implementation Method 2
causes atoms of the fuel to shed their electrons and form a plasma of ionized fuel droplets
Implementation Method 3
the plasma emits photons having the desired wavelength, which is provided as EUV radiation
Implementation Method 4
heating a portion of the rotatable vessel to an elevated temperature to generate a heating area on the inner surface
Data Source
AI summary
The EUV radiation source includes a rotatable EUV source vessel configured to collect fuel debris generated from the collision of fuel droplets and a laser beam. The source vessel includes an inner surface for receiving the fuel debris, an first aperture at one end of the inner surface, and a heater adjacent to the inner surface and configured to generate a heating area on the inner surface in coordination with a rotation speed of the source vessel. The fuel debris is reflowed to the heating area. A method for generating EUV radiation includes collecting fuel debris on an inner surface of a source vessel, rotating the source vessel at a rotation speed, and heating a portion of the source vessel to an elevated temperature to generate a heating area on the inner surface in coordination with the rotation speed. The fuel debris is reflowed to the heating area.