EUV Light Condenser Mirror Replacement via Movable Vessel Mechanism
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Solution Overview
Problem
The existing extreme ultraviolet light generation systems face significant downtime and labor-intensive processes during the replacement of the EUV light condenser mirror, primarily due to the need for crane-assisted vessel manipulation, which is time-consuming and requires extensive preparation and positioning adjustments.
Innovation Solution
The implementation of a vessel movement mechanism, including air cylinders and a positioning mechanism with taper pins and O-ring grooves, allows for the linear or rotational movement of the vessel to expose and cover the EUV light condenser mirror, eliminating the need for cranes and reducing preparation and positioning requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a crane is used to manipulate the vessel during mirror replacement, then the mirror can be replaced, but the downtime and labor required increase significantly
Solution Approach 1:
The vessel is designed with movable positioning mechanisms that allow it to be dynamically adjusted between different positions. The vessel can move from a first position where it covers the EUV light condenser mirror to a second position where it is retracted to expose the mirror, enabling quick access without crane manipulation.
Solution Approach 2:
The vessel incorporates self-positioning mechanisms including taper pins that automatically align and engage with positioning holes, and O-ring grooves that guide the vessel into the correct position. This self-service positioning eliminates the need for external crane assistance and extensive manual adjustment.
2Ease of operation
If a crane is used to manipulate the vessel, then the mirror can be accessed, but extensive preparation and positioning adjustments are required
Solution Approach 1:
The vessel is pre-equipped with positioning features including taper pins and O-ring grooves that are prepared in advance. These features ensure that when the vessel needs to be positioned, it can be quickly and accurately placed without requiring extensive on-site preparation or adjustment work.
Solution Approach 2:
The taper pins and O-ring grooves act as intermediary elements between the vessel and the chamber structure. These intermediaries facilitate easy positioning and alignment, serving as a mechanical interface that simplifies the replacement operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution significantly shortens the downtime and labor required for mirror replacement, enhancing operational efficiency and reducing the need for extensive staff and preparation time, while maintaining the system's cleanliness and accuracy.
Implementation Method 1
a chamber in which extreme ultraviolet light is generated by a target substance being irradiated with a laser beam to generate plasma from the target substance
Implementation Method 2
a collector mirror configured to condense the extreme ultraviolet light in the chamber
Data Source
AI summary
An extreme ultraviolet light generation apparatus includes: A. a chamber in which extreme ultraviolet light is generated by a target substance being irradiated with a laser beam to generate plasma from the target substance; B. a vessel as a tubular member forming the chamber; C. a reference member supporting the vessel; D. a collector mirror configured to condense the extreme ultraviolet light in the chamber, the collector mirror being attached to the reference member in a replaceable manner and covered by the vessel to be housed in the chamber; and E. a vessel movement mechanism provided to the reference member and configured to move the vessel between a first position at which the vessel covers the collector mirror and a second position at which the vessel is retracted from the first position to expose the collector mirror.