EUV Light Source Vibration Stabilization via Bellows and Feedback
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Solution Overview
Problem
In optical apparatuses using EUV light, vibrations from cooling and driving mechanisms, as well as light sources, cause instability in the light application area, particularly with DPP light sources where the light emitting point position fluctuates, affecting the precision of applications like semiconductor miniaturization.
Innovation Solution
An optical apparatus with a light source vacuum chamber, an optical system vacuum chamber connected by bellows, and vibration removal units, including sensors for detecting light and position, stabilizes the light application area by correcting the relative position and reducing vibrations through active control and air spring support.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a DPP light source is used, then the light source can be compact and efficient, but the position of the light emitting point fluctuates
Solution Approach 1:
The patent employs an optical sensor to detect the position of the light emitting point and feeds this information back to the vibration removal table control system. The control unit adjusts the vibration removal table's position based on the detected light emitting point position, creating a closed-loop feedback system that compensates for position fluctuations and maintains stable light application.
2Stability of the object's composition
If vibration removal tables are used to stabilize the optical system, then vibrations can be reduced, but the complexity of the apparatus increases
Solution Approach 1:
The patent divides the vibration removal function into separate modules: a first vibration removal table for the optical system and a second vibration removal table for the light source. This segmentation allows each table to be optimized for its specific function and enables independent control, reducing the overall complexity compared to a single integrated system while maintaining effective vibration removal.
3Object-affected harmful factors
If the light source and optical system are in separate vacuum chambers, then vibrations can be isolated, but the apparatus complexity increases
Solution Approach 1:
The patent introduces a bellows as an intermediary component connecting the light source vacuum chamber and the optical system vacuum chamber. The bellows acts as a flexible connector that maintains vacuum separation while allowing the optical path to pass through, effectively isolating vibrations between the two chambers without requiring complete physical separation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively stabilizes the light application area, preventing vibrations from propagating and maintaining precision in EUV light applications, ensuring consistent and accurate illumination even with fluctuating light sources.
Implementation Method 1
a bellows connecting the light source vacuum chamber with the optical system vacuum chamber, the bellows being configured so that light emitted from the light source passes therethrough
Implementation Method 2
an optical sensor disposed inside the optical system vacuum chamber, the optical sensor being configured to detect light emitted from the light source
Implementation Method 3
a position sensor disposed to detect a relative position of the light source vacuum chamber with respect to the optical system vacuum chamber
Implementation Method 4
a first vibration removal unit configured to remove vibrations from the optical system vacuum chamber; and a second vibration removal unit configured to remove vibrations from the light source vacuum chamber
Data Source
AI summary
An optical apparatus and its vibration removing method capable of stabilizing a place where light is applied are provided. An optical apparatus according to an aspect of the present disclosure includes a light source chamber, an EUV light source, an optical system chamber, an optical system configured to guide light entering the optical system chamber to an object through a bellows, an optical sensor configured to detect EUV light L2 emitted from the EUV light source, a position sensor disposed to detect a relative position of the optical system chamber with respect to the light source chamber, and a second vibration removal unit configured to remove vibrations from the light source chamber based on detection results of the optical sensor and the position sensor.