EUV Window Unit with Cooling Holder for Thermal Deformation Control
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Solution Overview
Problem
In the generation of extreme ultraviolet (EUV) light for semiconductor microfabrication, existing systems face challenges in maintaining the optical properties of windows due to heat loads from high-power laser beams, leading to inappropriate focusing and reduced performance.
Innovation Solution
A window unit with a holder featuring a flow channel for a cooling medium, where the window is made of materials with low thermal expansion coefficients, such as diamond, and the holder is made of materials with high thermal conductivity, ensuring efficient heat dissipation and minimizing thermal deformation, thus maintaining optical properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If a window is used to transmit laser beams in EUV light generation, then the laser beam can pass through the optical system, but the window undergoes thermal deformation due to heat load from high-power laser beams, leading to inappropriate focusing and reduced performance
Solution Approach 1:
The invention converts the harmful thermal effect into a beneficial cooling process by introducing a cooling medium flow channel that actively removes heat from the window, transforming the heat load problem into a controlled thermal management solution
Solution Approach 2:
A cooling medium (water or gas) is introduced as an intermediary substance to transfer heat away from the window through a flow channel, mediating between the heat source and the window to prevent thermal deformation
2Ease of manufacture
If conventional materials are used for the window, then manufacturing is easier, but thermal expansion causes optical property degradation under high heat load
Solution Approach 1:
The invention changes the material parameter by selecting window materials with low thermal expansion coefficients (such as diamond, sapphire, or quartz) that maintain dimensional stability and optical properties under high temperature conditions
Solution Approach 2:
The invention creates a composite structure combining the window material with a holder made of high thermal conductivity material, forming a hybrid system that leverages the advantageous properties of both materials for thermal management
3Device complexity
If no cooling mechanism is provided, then the device structure remains simple, but heat accumulation leads to thermal deformation and performance degradation
Solution Approach 1:
The invention employs hydraulic cooling by introducing a cooling medium flow channel that allows liquid or gas to circulate, using fluid dynamics to efficiently remove heat from the window and maintain optical performance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces thermal deformation and maintains the optical properties of windows, ensuring accurate focusing of EUV light and improving the performance of EUV light generation systems.
Implementation Method 1
the holder being provided with a flow channel thereinside configured to allow a fluid to flow
Implementation Method 2
a window configured to allow a laser beam to be transmitted therethrough
Implementation Method 3
a cooling unit configured to have a cooling medium flow into the holder via the inlet
Data Source
AI summary
A window unit may include: a window configured to allow a laser beam to be transmitted therethrough; and a holder for holding the window at a periphery thereof, the holder being provided with a flow channel thereinside configured to allow a fluid to flow.