EUV Light Source Window Deterioration Detection
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Solution Overview
Problem
The EUV light source apparatus faces challenges in efficiently generating extreme ultra-violet light due to deterioration of the window and optical elements within the EUV light generating chamber, making it difficult to detect and address issues such as absorption of laser beams, temperature rise, and reduced focusing properties, which affects the overall efficiency and stability of the light generation process.
Innovation Solution
Incorporating a temperature sensor and a processing unit to detect temperature changes in the window and optical elements, allowing for the determination of deterioration and implementing a cooling channel to supply cooling water, enabling prompt detection and handling of efficiency fluctuations by determining the amount of waste heat carried by the cooling water.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the window and optical elements are used continuously in the EUV light generating chamber, then the EUV light generation efficiency is improved, but the window and optical elements deteriorate due to laser beam absorption and temperature rise
Solution Approach 1:
The patent applies preliminary action by providing a temperature sensor and processing unit that detect temperature changes in the window and optical elements before significant deterioration occurs. The system monitors temperature in advance and triggers cooling or replacement actions proactively, preventing the harmful effects of excessive heat accumulation and laser beam absorption before they compromise the reliability of the optical components.
2Reliability
If the window and optical elements are monitored continuously, then the deterioration can be detected early, but the device complexity increases due to additional sensors and processing units
Solution Approach 1:
The patent implements feedback by using a temperature sensor to continuously monitor the temperature of the window and optical elements, with the processing unit receiving this temperature information and comparing it against predetermined thresholds. This feedback mechanism enables the system to automatically detect deterioration conditions and trigger appropriate responses (such as cooling or replacement alerts) without requiring complex manual monitoring systems, thus achieving reliable deterioration detection with minimal added complexity.
3Temperature
If cooling water is supplied to the optical elements, then the temperature rise is reduced, but the device complexity increases due to cooling channels and fluid management systems
Solution Approach 1:
The patent applies hydraulics by introducing cooling channels through which cooling water flows to remove heat from the window and optical elements. The cooling water absorbs excess heat generated during EUV light generation and transports it away from the optical components, effectively controlling temperature rise. This hydraulic cooling approach provides efficient thermal management while maintaining relatively simple system integration compared to more complex active cooling mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables easy detection of window and optical element deterioration, allowing for timely replacement and maintenance, thereby stabilizing EUV light generation and maintaining efficiency.
Implementation Method 1
a cooling channel to supply cooling water, enabling prompt detection and handling of efficiency fluctuations by determining the amount of waste heat carried by the cooling water
Implementation Method 2
a cooling channel to supply cooling water, enabling prompt detection and handling of efficiency fluctuations by determining the amount of waste heat carried by the cooling water
Implementation Method 3
Incorporating a temperature sensor and a processing unit to detect temperature changes in the window and optical elements
Implementation Method 4
applying a laser beam to a target material to turn the target material into plasma
Implementation Method 5
applying a laser beam to a target material to turn the target material into plasma
Data Source
AI summary
An EUV light source apparatus capable of easily detecting deterioration etc. of a window of an EUV light generating chamber. The EUV light source apparatus includes a driver laser, an EUV light generating chamber, a window which passes the laser beam into the EUV light generating chamber, an EUV light collector mirror, laser beam focusing optics which focuses a laser beam onto a trajectory of a target material, a temperature sensor which detects a temperature of the window, and a laser beam optics deterioration determination processing unit which determines deterioration of the window based on the temperature of the window detected by the temperature sensor when extreme ultra violet light is generated.