Opto-mechanical Transducer Evanescent Field Gas Detection

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Solution Overview

Problem

Current integrated systems for photo-acoustic spectrometry face challenges in achieving precise gas concentration detection due to the squeeze film effect and limitations in increasing the reception surface of mechanical sensors without compromising system size and integration.

Innovation Solution

An opto-mechanical system that utilizes a mechanical sensor with a sensor element capable of vibrating to modify the evanescent field of an optical detector, allowing for precise detection of acoustic waves generated by gas excitation, thereby overcoming the squeeze film effect and enhancing sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the reception surface of the mechanical sensor is increased to maximize mechanical detection of the acoustic wave, then the detection sensitivity is improved, but the size of the system is increased which is unfavorable for integration optimization

Engineering Contradiction:
Improvedetection sensitivityVSAvoidsystem size
Core Design Contradiction:
Measurement precisionVSVolume of moving object

Solution Approach 1:

The patent replaces the capacitive detection system with an optical detection system. Instead of using a mechanical sensor with electrodes for capacitive detection, the invention uses an optical sensor to detect the vibration of the mechanical sensor through optical means, thereby eliminating the squeeze film effect and improving detection sensitivity without increasing system size.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces an optical intermediary to transfer the mechanical vibration signal to the optical sensor. The optical sensor detects the vibration of the mechanical sensor through optical interaction, serving as an intermediary that converts mechanical motion into optical signals without requiring direct mechanical contact or capacitive coupling.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If capacitive detection means are used with a mechanical sensor, then the system can detect acoustic waves, but the air between the mechanical sensor and electrode creates a viscous damper (squeeze film effect) that deteriorates detection

Engineering Contradiction:
Improvedetection capabilityVSAvoidsqueeze film effect
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the capacitive detection system with an optical detection system. Instead of using a mechanical sensor with electrodes for capacitive detection, the invention uses an optical sensor to detect the vibration of the mechanical sensor through optical means, thereby eliminating the squeeze film effect and improving detection sensitivity without increasing system size.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces an optical intermediary to transfer the mechanical vibration signal to the optical sensor. The optical sensor detects the vibration of the mechanical sensor through optical interaction, serving as an intermediary that converts mechanical motion into optical signals without requiring direct mechanical contact or capacitive coupling.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Volume of moving object

If the size of the system is reduced for better integration, then the reception surface of the mechanical sensor is limited, but this reduces the mechanical detection capability

Engineering Contradiction:
Improvesystem sizeVSAvoidmechanical detection capability
Core Design Contradiction:
Volume of moving objectVSMeasurement precision

Solution Approach 1:

The patent replaces the capacitive detection system with an optical detection system. Instead of using a mechanical sensor with electrodes for capacitive detection, the invention uses an optical sensor to detect the vibration of the mechanical sensor through optical means, thereby eliminating the squeeze film effect and improving detection sensitivity without increasing system size.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system achieves precise and sensitive detection of gas concentrations, including very low levels, while maintaining a compact design, thereby improving upon the limitations of existing photo-acoustic spectrometry systems.

Implementation Method 1

The mechanical sensor is intended to receive an acoustic wave to set the sensing element vibrating at a vibration frequency

Methodology Applied
Scientific EffectAcoustic wave: Sound

Implementation Method 2

an optical detector capable of guiding light radiation substantially parallel to the longitudinal plane, the optical detector having an evanescent field. The vibration of the sensor element modifies the evanescent field of the optical detector

Methodology Applied
Scientific EffectEvanescent field:

Implementation Method 3

The vibration of the sensor element modifies the evanescent field of the optical detector, allowing for precise detection of acoustic waves

Methodology Applied
Scientific EffectEvanescent field modulation:

Implementation Method 4

when modulated light radiation, particularly laser radiation, is emitted into a medium containing the gas to be analyzed, the species constituting the gas absorbs at least part of this radiation if it has a wavelength in the absorption range of the species, causing excitation of the molecules of the species

Methodology Applied
Scientific EffectPhotoacoustic effect: Photoacoustic Effect

Implementation Method 5

The relaxation of these excited molecules can take place in several different ways, including: a. By radiative relaxation causing the emission of a photon

Methodology Applied
Scientific EffectRadiative relaxation:

Implementation Method 6

b. By collision with another molecule, causing the emission of heat

Methodology Applied
Scientific EffectCollisional relaxation:

Implementation Method 7

By collision with another molecule, causing the emission of heat

Methodology Applied
Scientific EffectCollisional heating:

Implementation Method 8

The emission of heat due to a collision with another molecule causes, among other things, a phenomenon of expansion and contraction of the gas

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Implementation Method 9

The emission of heat due to a collision with another molecule causes, among other things, a phenomenon of expansion and contraction of the gas, which generates an acoustic wave

Methodology Applied
Scientific EffectAcoustic wave generation: Sound

Data Source

PatentEP4549928A1Opto-mechanical transduction system for photoacoustic spectrometry
Publication Date: 2025.05.07 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • EP4549928A1 patent drawingFigure 1
  • EP4549928A1 patent drawingFigure 2
  • EP4549928A1 patent drawingFigure 3A~3B

AI summary

The invention relates to an opto-mechanical system for transducing displacement with an optical phase shift, comprising a mechanical sensor including a sensing element. The sensing element has an upper face extending primarily in a plane called the longitudinal plane when the system is at rest. The mechanical sensor is designed to receive an acoustic wave to cause the sensing element to vibrate at a vibration frequency. The system further comprises an optical detector capable of guiding light radiation substantially parallel to the longitudinal plane. The optical detector has an evanescent field. The vibration of the sensing element modifies the evanescent field of the optical detector, and the sensing element moves in a direction called the transverse direction, substantially perpendicular to the longitudinal plane, when it is vibrating.