Single Evaporation Chamber with Rotation Mechanism for OLED Manufacturing
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Solution Overview
Problem
The challenge in manufacturing display devices with organic light-emitting diodes (OLEDs) is the need for reduced installation space in manufacturing devices, as existing methods require multiple evaporation chambers with different nozzle orientations, leading to increased device size and complexity.
Innovation Solution
A manufacturing device with a single evaporation chamber featuring first and second evaporation sources between conveyance paths, where the processing substrate is rotated to allow for the deposition of materials with different composition ratios, reducing the need for multiple chambers and minimizing space requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple evaporation chambers with different nozzle orientations are used, then materials with different composition ratios can be deposited, but the device size and complexity increase
Solution Approach 1:
The patent combines multiple evaporation sources (first evaporation source and second evaporation source) into a single evaporation chamber, allowing deposition of materials with different composition ratios without requiring multiple separate chambers. This merging reduces device complexity while maintaining the ability to vary material composition.
Solution Approach 2:
The single evaporation chamber is designed to perform multiple functions by accommodating different evaporation sources that can deposit materials with varying composition ratios. The chamber serves as a universal deposition environment that can handle different material deposition requirements through the rotation mechanism and multiple sources.
2Adaptability or versatility
If multiple evaporation chambers are used, then different evaporation conditions can be achieved, but the installation space increases
Solution Approach 1:
The patent introduces a rotation dimension by incorporating a rotation mechanism that rotates the substrate or evaporation sources within the single chamber. This rotational capability allows different evaporation conditions to be achieved by changing the orientation or position during deposition, effectively adding a temporal/dynamic dimension to the deposition process without requiring multiple spatial chambers.
Solution Approach 2:
The system employs dynamic control of the evaporation process by rotating the substrate or sources during deposition, allowing the evaporation conditions to change over time within the same chamber. This dynamic approach enables multiple evaporation conditions to be applied sequentially or simultaneously without increasing the physical footprint of the device.
3Adaptability or versatility
If multiple evaporation chambers are used, then different materials can be deposited, but the device size increases
Solution Approach 1:
The patent merges multiple evaporation sources into a single chamber, allowing different materials to be deposited by switching between sources or by rotating the substrate to expose different surfaces to different sources. This consolidation reduces the overall device volume while maintaining material deposition versatility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables the formation of evaporated films with different evaporation conditions in a single chamber, reducing the device's size and preventing contamination, while maintaining efficient film deposition and reducing the retention of processing substrates on conveyance paths.
Implementation Method 1
a first evaporation source configured to emit a material to the first conveyance path, the second evaporation source configured to emit a material to the second conveyance path
Data Source
AI summary
According to one embodiment, a manufacturing device includes a first evaporation chamber including first and second evaporation sources located between a first conveyance path and a second conveyance path for conveying a processing substrate. The first evaporation source is configured to emit a material to the first conveyance path. The second evaporation source is configured to emit a material to the second conveyance path. The manufacturing device further includes a first rotation chamber including a rotation mechanism which rotates while holding the processing substrate carried out of the first conveyance path of the first evaporation chamber, and configured to carry out the processing substrate to the second conveyance path of the first evaporation chamber.