Evaporation Source Cooling Mechanism for Rapid Crucible Thermal Management
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Solution Overview
Problem
Existing evaporation systems face challenges in rapidly cooling crucibles during thermal evaporation processes, leading to significant chamber downtime and increased costs due to the slow nature of radiative cooling.
Innovation Solution
An evaporation system with a cooling mechanism featuring a cylindrical cooling jacket surrounding the crucible, a cooling gap between the crucible and the jacket, and a coolant flow system using inert gases or clean dry air, which allows for rapid cooling of the crucible from high temperatures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If radiative cooling is used to cool the crucible, then the cooling mechanism is simple, but the cooling rate is very slow leading to significant chamber downtime
Solution Approach 1:
The patent introduces a cooling gas as an intermediary substance that transfers heat from the crucible. The cooling gas flows through a cooling channel surrounding the crucible, absorbing heat via convection and conduction, thereby rapidly cooling the crucible without requiring complex active cooling systems. This mediator approach resolves the contradiction by achieving fast cooling rates while maintaining relatively simple device structure.
2Reliability
If the crucible is cooled rapidly, then unwanted evaporation and reactions with oxygen are prevented, but the cooling mechanism becomes more complex
Solution Approach 1:
The cooling gas serves as an intermediary that enables rapid cooling through convective and conductive heat transfer. The gas flows through the cooling channel, absorbing heat from the crucible wall and carrying it away, achieving rapid temperature reduction that prevents unwanted evaporation and oxidation reactions while maintaining a relatively simple overall system structure.
Solution Approach 2:
The patent employs a pneumatic cooling system where a cooling gas (fluid) is circulated through the cooling channel to remove heat from the crucible. This hydraulic/pneumatic approach enables rapid and controlled cooling through fluid flow, achieving the reliability of preventing unwanted reactions without requiring complex mechanical or electronic cooling mechanisms.
3Speed
If a cooling gas flow system is implemented, then rapid cooling is achieved, but the device complexity increases
Solution Approach 1:
The cooling gas acts as an intermediary heat transfer medium that enables rapid cooling through convection and conduction. The gas flows through the cooling channel surrounding the crucible, efficiently removing heat and achieving high cooling rates. This approach maintains relatively simple device structure by using a passive fluid-based cooling mechanism rather than active mechanical or electronic systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables rapid cooling of the crucible, reducing unwanted evaporation and preventing reactions with oxygen, thus minimizing substrate and source material waste, and reducing downtime and costs.
Implementation Method 1
cooling the crucible by flowing a coolant fluid through the cooling gap
Implementation Method 2
cooling gap is defined between the outer surface of the at least one sidewall of the crucible and an inner surface of a sidewall of the cylindrical cooling jacket
Data Source
AI summary
A method, system, and evaporation source for reactive deposition is provided. The system includes a deposition surface operable for depositing a material onto a substrate provided on the deposition surface. The system further includes an evaporation source positioned for depositing the material onto the substrate. The evaporation source includes a crucible. The crucible includes a base and at least one sidewall extending upward from the base and defining an interior region of the crucible. The evaporation source further includes a cooling mechanism. The cooling mechanism includes a cylindrical cooling jacket surrounding an outer surface of the at least one sidewall while leaving a bottom surface of the base exposed, wherein a cooling gap is defined between the outer surface of the at least one sidewall of the crucible and an inner surface of a sidewall of the cylindrical cooling jacket.