Evaporation Crucible Fluid Guide Inert Gas Kinetic Energy
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Solution Overview
Problem
The existing evaporation crucibles for OLED production have low material utilization rates due to long paths for evaporation gas molecules to reach the substrate, resulting in most material depositing on the crucible walls rather than the substrate, which reduces efficiency and contaminates the vacuum environment.
Innovation Solution
An evaporation crucible with a fluid guide member and multiple inert gas inlet nozzles is used to introduce inert gas, increasing the kinetic energy of evaporation gas molecules and directing them more effectively towards the substrate, improving material utilization and efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If point source evaporation is used with a traditional crucible, then the evaporation process is mature and mass production is achieved, but the material utilization rate is low (not greater than 5%) and most material deposits on the crucible wall
Solution Approach 1:
The invention divides the single-point evaporation source into multiple evaporation sources by setting up several crucibles (first crucible, second crucible, etc.) arranged in an array. Each crucible serves as an independent evaporation source, collectively covering the entire substrate surface. This segmentation approach increases material utilization rate while maintaining mass production capability.
Solution Approach 2:
The invention transitions from a single-point (0D/1D) evaporation source to a two-dimensional array of multiple crucibles arranged in specific geometric patterns (triangular, square, or hexagonal lattices). This dimensional change allows simultaneous evaporation from multiple points, directing material more efficiently onto the substrate and reducing wall deposition.
2Device complexity
If the evaporation path is long from crucible to substrate, then the crucible structure is simple, but the material deposition on substrate is insufficient (not greater than 5%) and cavity pollution occurs
Solution Approach 1:
By segmenting the evaporation source into multiple crucibles positioned at different locations, the invention creates multiple shorter evaporation paths from each crucible to its corresponding substrate region. This reduces the overall path length compared to a single distant crucible, improving deposition efficiency without significantly complicating the device structure.
Solution Approach 2:
The invention introduces an intermediary fluid guide member that directs the evaporation material flow from multiple crucibles toward the substrate. This fluid guide acts as a mediator to optimize the transport path of evaporated material, ensuring efficient delivery to the substrate while minimizing wall deposition and cavity pollution.
3Device complexity
If most evaporation material deposits on the crucible wall, then the crucible structure is simple, but the vacuum degree of the cavity is affected and the cavity is polluted
Solution Approach 1:
The segmented multi-crucible configuration distributes the evaporation load across multiple sources, directing material flow more uniformly toward the substrate. This reduces the concentration of material depositing on any single crucible wall and minimizes overall cavity pollution compared to a single high-flux crucible.
Solution Approach 2:
The invention converts the potentially harmful effect of long evaporation paths and material scattering into a benefit by using multiple crucibles to create controlled, directed material flow. The fluid guide members harness the natural evaporation flow and redirect it efficiently onto the substrate, turning what would be wasted material into useful deposition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly increases the deposition of evaporation material on the substrate, enhancing material utilization rates and evaporation efficiency while maintaining vacuum integrity.
Implementation Method 1
a fluid guide member communicated with the crucible body, and a plurality of gas inlet nozzles being distributed on a side wall of the fluid guide member
Implementation Method 2
introduce inert gas, increasing the kinetic energy of evaporation gas molecules and directing them more effectively towards the substrate
Implementation Method 3
the evaporation material is heated under a certain vacuum condition, the evaporation material is melted (or sublimated) into vapor composed of atoms, molecules or atomic groups
Implementation Method 4
the evaporation material is heated under a certain vacuum condition, the evaporation material is melted (or sublimated) into vapor composed of atoms, molecules or atomic groups
Implementation Method 5
the vapor is congealed on a surface of the substrate to form a film
Implementation Method 6
an evaporation material is heated under a certain vacuum condition
Data Source
AI summary
Embodiments of the present disclosure provide an evaporation crucible and an evaporation device. The evaporation crucible includes a crucible body and a fluid guide member communicated with the crucible body, and a plurality of gas inlet nozzles being distributed on a side wall of the fluid guide member.