Vacuum Evaporation Heating Element for Organic Material Film Deposition

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Solution Overview

Problem

Existing vacuum evaporation methods for organic materials face challenges such as thermal deterioration, difficulty in controlling vacuum evaporation rates, and inefficiencies in large-scale production due to indirect heating and filler-related issues, leading to prolonged heating times and potential material degradation.

Innovation Solution

A method and apparatus where a container with an open side contains an organic material and a heating element that is not fixed to the container, allowing only the organic material near the heating element to reach evaporating temperature, with options for electron beam, high-frequency induction, or infrared heating, and multiple containers or partitions for continuous evaporation and material replenishment without vacuum disruption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If indirect heating method (heater heating through container) is used, then heating uniformity is improved, but heating time becomes excessively long (several hours) and heating response is poor

Engineering Contradiction:

Improveheating uniformityVSAvoidheating time

Core Design Contradiction:

Stability of the object's compositionVSLoss of time

Solution Approach 1:

The patent introduces a heat conduction member as an intermediary between the heater and the organic material. This mediator has high thermal conductivity to rapidly transfer heat from the heater to the organic material, achieving both fast heating response and uniform heat distribution without the excessively long heating times associated with direct container heating

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces the conventional indirect heating method (heating through container walls) with a direct thermal contact system using a heat conduction member. This substitution enables much faster heat transfer by establishing direct thermal pathways from the heat source to the material, eliminating the thermal resistance of the container walls

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Speed

If electron beam direct irradiation method is used, then heating speed is improved, but organic material decomposition and deterioration occur due to high energy cutting intermolecular bonds

Engineering Contradiction:

Improveheating speedVSAvoidmaterial decomposition

Core Design Contradiction:

SpeedVSObject-affected harmful factors

Solution Approach 1:

The patent introduces a heat conduction member as a mediator between the electron beam and the organic material. The electron beam heats the heat conduction member, which then transfers heat thermally to the organic material. This intermediary approach maintains the fast heating capability of electron beams while avoiding direct high-energy irradiation that would decompose the organic material

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent substitutes direct electron beam irradiation of the organic material with indirect heating through a heat conduction member. This replacement eliminates the harmful direct interaction between high-energy electrons and organic molecules while preserving the rapid heating advantage through efficient thermal conduction

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Speed

If resistance heating method is used, then heating response is improved, but container size cannot be enlarged due to electric capacity limitations

Engineering Contradiction:

Improveheating responseVSAvoidcontainer size

Core Design Contradiction:

SpeedVSArea of stationary object

Solution Approach 1:

The patent uses a heat conduction member as an intermediary that can be designed in various sizes and shapes. This mediator decouples the heating capability from container size limitations, allowing large containers to be heated effectively by positioning the heat conduction member strategically within the container, thus enabling both fast heating response and large-scale operation

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent segments the heating function from the container structure by introducing a separate heat conduction member. This segmentation allows the heating system to be scaled independently from the container size, enabling large container configurations while maintaining fast heating response through the concentrated, efficient heat transfer of the heat conduction member

Inventive Principle:

Principle #1Segmentation

4Ease of operation

If heater heating method is used, then ease of operation is improved, but organic material remaining in container is exposed to evaporating temperature for long duration causing thermal decomposition

Engineering Contradiction:

Improveoperation simplicityVSAvoidthermal decomposition

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The patent uses a heat conduction member as an intermediary that provides localized and controlled heating. This mediator enables precise temperature control at the heating zone, preventing excessive heat exposure to the entire organic material bulk, thus avoiding thermal decomposition while maintaining ease of operation through simple heater control

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent applies local quality by concentrating the heating action at the interface between the heat conduction member and the organic material. This localized heating approach ensures that only the necessary portion of the material is exposed to high temperatures, preventing thermal decomposition of the bulk material while maintaining operational simplicity

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach prevents thermal deterioration, reduces heating time, and stabilizes vacuum evaporation rates over prolonged periods, enhancing productivity and control in large-scale organic material evaporation processes.

Implementation Method 1

heating element which is not fixed to the container and which is in contact with the surface of the organic material held in the container

Methodology Applied

Scientific EffectElectron beam heating: Electron Beam

Implementation Method 2

options for electron beam, high-frequency induction, or infrared heating

Methodology Applied

Scientific EffectElectromagnetic energy to thermal energy conversion: Electromagnetic Induction

Implementation Method 3

the evaporated material obtained by heating a film formation material to vapor pressure temperature is made to adhere to the substrate surface

Methodology Applied

Scientific EffectVacuum evaporation: Evaporation

Implementation Method 4

a method and apparatus where a container with an open side contains an organic material and a heating element that is not fixed to the container, allowing only the organic material near the heating element to reach evaporating temperature

Methodology Applied

Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentUS8357241B2Method of organic material vacuum evaporation and apparatus thereof

Publication Date: 2013.01.22 CANON TOKKI CORP

AI summary

There is provided a method of vacuum evaporation comprising causing evaporated material (5) from vacuum evaporation source (20) furnished with container (1) with its one side open accommodating organic material (2) to form a film on opposed substrate (7), wherein the vacuum evaporation source has heating element (3) not fixed to the container, and being in contact with the surface of organic material held in the container, and wherein the organic material is evaporated by heating of the heating element only, the evaporated material released through at least one hole (6) or at least one slit made in the heating element.