Vacuum Evaporation Nozzle Recycling Structure

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Solution Overview

Problem

In the vacuum evaporation process for organic light-emitting diode manufacturing, material vapor is wasted as it is jetted outside the substrate, leading to reduced material utilization and increased manufacturing costs, and the accumulation of evaporated material on the angle plate can clog the nozzle, affecting production capacity.

Innovation Solution

A vacuum evaporation device with a recycling structure around the nozzle, featuring a stepped bending angle plate and recycling plates that collect fallen material, preventing nozzle clogging and allowing for material reuse.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of substance

If an angle plate is arranged on the material container to limit the jetting angle, then material vapor is prevented from being jetted outside the substrate, but the evaporated material accumulates on the angle plate and clogs the nozzle

Engineering Contradiction:
Improvematerial vapor wasteVSAvoidnozzle clogging
Core Design Contradiction:
Loss of substanceVSReliability

Solution Approach 1:

The patent converts the harmful accumulation of material vapor on the angle plate into a beneficial recycling opportunity. By adding recycling structures (guiding plates and collection containers) that redirect fallen material back to the material container, the system transforms what was previously a clogging problem into a material recovery benefit, maintaining the angle plate's function of preventing vapor waste while eliminating the clogging issue

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent implements a material recovery system where material vapor that falls onto the angle plate is not discarded but instead is collected and returned to the material container. The recycling plates guide the fallen material into collection containers, from which it can be reused, thereby recovering material that would otherwise be wasted or cause clogging

Inventive Principle:
Principle #34Discarding and recovering

2Manufacturing precision

If the material vapor is jetted in all directions with maximum jetting angle of 180 degrees, then the substrate can be fully covered, but the material vapor radiated outside the substrate is wasted

Engineering Contradiction:
Improvesubstrate coating coverageVSAvoidmaterial vapor waste
Core Design Contradiction:
Manufacturing precisionVSLoss of substance

Solution Approach 1:

The patent segments the space around the nozzle into different functional zones using the angle plate and recycling plates. The angle plate creates a defined evaporation zone that directs material vapor toward the substrate, while the recycling plates create a separate collection zone for capturing and redirecting material that falls outside the substrate area, thus maintaining coverage while reducing waste

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The recycling structure effectively collects and reuses fallen material, preventing nozzle clogging and reducing production costs by maintaining efficient evaporation processes.

Implementation Method 1

the organic light-emitting diode is deposited mainly through a heating evaporation coating manner

Methodology Applied
Scientific EffectHeating evaporation: Evaporation

Implementation Method 2

the recycling structure is configured to receive material when the material sprayed from the nozzle is fallen down

Methodology Applied
Scientific EffectGravity: Gravitation

Data Source

PatentUS10792688B2Vacuum evaporation device and system
Publication Date: 2020.10.06 BOE TECHNOLOGY GROUP CO LTD
  • US10792688B2 patent drawing
  • US10792688B2 patent drawing
  • US10792688B2 patent drawing

AI summary

A vacuum evaporation device and system comprises a material container and a recycling structure, wherein a nozzle is arranged on the upper end surface of the material container; the recycling structure is arranged around the nozzle; and the recycling structure is configured to receive material when the material sprayed from the nozzle is fallen down. By arranging the recycling structure, the deposited material is received when it is fallen down, so that the nozzle is prevented from being clogged by the fallen material.