Evaporation Device with Rotation Chambers for OLED Layer Formation
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Solution Overview
Problem
The manufacturing of organic light-emitting diode (OLED) display devices requires reduction in cost and installation space, particularly in the evaporation processes for forming organic layers and upper electrodes, as current methods are inefficient and space-consuming.
Innovation Solution
An evaporation device with a configuration that includes multiple evaporation chambers arranged in line in two conveyance directions, along with rotation chambers, allows for the formation of organic layers and upper electrodes without the need for masks, optimizing the use of space and reducing costs by enabling the deposition of materials in a controlled manner.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If traditional evaporation methods are used to form organic layers and upper electrodes, then the manufacturing process can be completed, but the installation space and operational costs are excessive
Solution Approach 1:
The patent combines multiple evaporation chambers into a single integrated device with shared components. The first and second evaporation chambers are merged into one device body, sharing the substrate support table, rotation mechanism, and vacuum system. This consolidation reduces installation space while maintaining the ability to form multiple layers (organic layer and upper electrode) through sequential evaporation processes.
Solution Approach 2:
The evaporation device is designed with multi-functionality to perform multiple evaporation operations within a single chamber system. The same evaporation chamber can form both the organic layer and the upper electrode by changing the evaporation source material, eliminating the need for separate dedicated chambers for each layer formation process.
2Manufacturing precision
If multiple separate evaporation chambers are used for forming different layers, then manufacturing precision can be maintained, but the device complexity and cost increase
Solution Approach 1:
The patent segments the evaporation process into distinct temporal and spatial phases within a single chamber. The substrate support table is divided into multiple regions (first region for organic layer, second region for upper electrode), and the evaporation source is sequentially positioned over different regions. This segmentation allows precise control of each layer formation while maintaining a unified, less complex device structure.
Solution Approach 2:
The patent employs dynamic positioning of the evaporation source and substrate support table within the same chamber. The evaporation source can be moved to different positions to deposit material on different regions of the substrate, and the substrate table can be rotated to present different areas to the evaporation source. This dynamic capability enables multi-layer formation with high precision without requiring multiple static chambers.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces the operational costs and installation space required for the evaporation device, enabling efficient formation of organic layers and upper electrodes, thereby enhancing the manufacturing efficiency of OLED display devices.
Implementation Method 1
an evaporation source configured to emit material in a vapor state
Implementation Method 2
thereby depositing the material on the processing substrate
Data Source
AI summary
According to one embodiment, an evaporation device includes a first chamber group including a plurality of evaporation chambers arranged in line in a first conveyance direction, a second chamber group including a plurality of evaporation chambers arranged in line in a second conveyance direction, a first rotation chamber which is connected to a first evaporation chamber located at a upstream position in the first conveyance direction and a second evaporation chamber located at a downstream position in the second conveyance direction, and a second rotation chamber which is connected to a third evaporation chamber located at a downstream position in the first conveyance direction and a fourth evaporation chamber located at a upstream position in the second conveyance direction.