Evaporation Source Mesh Screen Thermal Management

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Solution Overview

Problem

Existing evaporation sources for organic light emitting display devices face issues with heat transfer to shadow masks or substrates, leading to thermal damage and instability in film deposition, as well as clogging of the opening portion due to splashed deposition material, which affects reproducibility and efficiency in mass production.

Innovation Solution

An evaporation source with a crucible and a mesh member having thermally conductive balls coated on it, which separates the deposition material and prevents direct heat transfer to the substrate while blocking splashes, ensuring stable deposition and increased material capacity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the opening portion of the crucible is used for deposition material evaporation, then the evaporation process can be performed, but the opening portion becomes clogged with splashed deposition material

Engineering Contradiction:

Improveevaporation process efficiencyVSAvoidopening portion clogging

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

A mesh screen is introduced as an intermediary component between the deposition material and the opening portion. The mesh screen allows vapor to pass through while physically blocking splashed liquid material from reaching and clogging the opening portion, thus resolving the contradiction between maintaining evaporation efficiency and preventing clogging.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Power

If heat is generated in the evaporation source, then deposition material can be evaporated, but thermal damage occurs to the shadow mask or substrate

Engineering Contradiction:

Improveheat generation for evaporationVSAvoidthermal damage to shadow mask or substrate

Core Design Contradiction:

PowerVSObject-affected harmful factors

Solution Approach 1:

The mesh screen serves as a thermal intermediary that blocks direct heat transfer from the hot crucible to the shadow mask and substrate while still allowing the evaporation process to occur. This mediator protects sensitive components from thermal damage while maintaining the necessary heat for deposition.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The crucible structure is segmented into distinct functional zones: the upper portion for heat generation, the mesh screen as a protective barrier, and the lower portion for deposition. This segmentation allows independent optimization of heat generation and protection functions, resolving the contradiction between power generation and thermal damage prevention.

Inventive Principle:

Principle #1Segmentation

3Productivity

If the evaporation source is designed for rapid deposition, then mass production efficiency increases, but thermal expansion causes substrate dropping or mask distortion

Engineering Contradiction:

Improvedeposition speedVSAvoidsubstrate and mask dimensional stability

Core Design Contradiction:

ProductivityVSShape

Solution Approach 1:

The mesh screen acts as a thermal intermediary that decouples the high-temperature evaporation zone from the substrate and shadow mask areas. This allows rapid deposition to occur in the heated crucible while the mesh screen prevents excessive heat from reaching the substrate and mask, maintaining their dimensional stability and preventing distortion.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution prevents clogging and thermal damage, stabilizes evaporation rates, and enhances reproducibility of film thickness, making it suitable for rapid and efficient mass production of organic light emitting display devices.

Implementation Method 1

thermally conductive balls coated on the mesh member

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

a vacuum deposition method forming a pixel patterning using a shadow mask on the substrate by evaporating organic material under a high vacuum atmosphere

Methodology Applied

Scientific EffectEvaporation: Evaporation

Implementation Method 3

forming the organic thin film and the metal thin film on the substrate using an evaporation method in a high vacuum state

Methodology Applied

Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentUS8366831B2Evaporation source

Publication Date: 2013.02.05 SAMSUNG DISPLAY CO LTD

AI summary

The present invention relates to an evaporation source used in a vacuum deposition apparatus for forming an organic film or a metal film. The present invention provides an evaporation source including: a crucible accommodating a deposition material and having an opening portion through which the deposition material passes; a mesh member installed in the opening portion of the crucible and having a plurality of holes; and thermally conductive balls coated on the mesh member. Here, the thermally conductive balls are provided to cover the deposition material having a predetermined interval with the deposition material, not being mixed with the deposition material filling the crucible.