Evaporation Source with Detachable Secondary Body

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Solution Overview

Problem

Conventional vacuum evaporation apparatuses are limited in their ability to arbitrarily set the evaporation direction relative to the film formation object, requiring complex mechanisms and increased costs for dual-surface film formation.

Innovation Solution

An evaporation source with a main cylindrical body and a detachably mounted secondary cylindrical body, allowing the evaporation direction to be adjusted by shifting the phase of the discharge opening, and incorporating a distribution plate for uniform evaporation material discharge.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a conventional evaporation source with fixed discharge opening is used, then the structure is simple, but the evaporation direction cannot be arbitrarily set and dual-surface film formation requires complex mechanisms

Engineering Contradiction:

Improveevaporation direction setting flexibilityVSAvoidapparatus structure complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The evaporation source is divided into a main body and a detachable secondary cylindrical body. The secondary body can be removed and reattached in different orientations, allowing the discharge opening to face different directions without redesigning the entire evaporation source structure.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The secondary cylindrical body is designed to be detachably mountable, enabling dynamic reconfiguration of the evaporation direction. This allows the system to adapt between different evaporation modes (upward, downward, horizontal) by simply changing the orientation of the secondary body rather than using fixed complex mechanisms.

Inventive Principle:

Principle #15Dynamics

2Productivity

If the lid body is left open during evaporation, then evaporation material can be freely discharged, but vapor pressure becomes unstable and material accumulation occurs

Engineering Contradiction:

Improveevaporation material discharge efficiencyVSAvoidvapor pressure stability

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The secondary cylindrical body acts as an intermediary chamber between the crucible and the external environment. It allows evaporation material to be discharged while maintaining controlled vapor pressure, preventing both material accumulation in the crucible and pressure instability in the vacuum chamber.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The evaporation system is segmented into the sealed crucible chamber and the secondary discharge chamber. This segmentation allows the lid to remain closed during evaporation while still enabling controlled discharge through the secondary body, maintaining vapor pressure stability while ensuring material discharge.

Inventive Principle:

Principle #1Segmentation

3Productivity

If evaporation material is heated at high temperature, then evaporation rate increases, but material accumulation on the evaporation source surface occurs

Engineering Contradiction:

Improveevaporation rateVSAvoidevaporation material accumulation

Core Design Contradiction:

ProductivityVSObject-generated harmful factors

Solution Approach 1:

The secondary cylindrical body extracts the discharge function from the main evaporation chamber. By providing a separate discharge path through this secondary body, accumulated evaporation material can be efficiently removed from the evaporation source surface, preventing harmful accumulation while maintaining high evaporation rates.

Inventive Principle:

Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables flexible evaporation direction settings for both 'depo-up' and 'depo-down' systems, ensuring uniform film thickness distribution and reducing costs by preventing evaporation material accumulation and stabilizing vapor pressure.

Implementation Method 1

the evaporation material in the crucible part is heated by the heating means so as to sublime or vaporize the evaporation material

Methodology Applied

Scientific EffectSublimation: Sublimation

Implementation Method 2

the evaporation material in the crucible part is heated by the heating means so as to sublime or vaporize the evaporation material

Methodology Applied

Scientific EffectVaporization: Evaporation

Implementation Method 3

the sublimated or vaporized evaporation material is allowed to be discharged out of the discharge opening due to pressure difference

Methodology Applied

Scientific EffectPressure difference: Pressure Gradient

Data Source

PatentUS20220316047A1Evaporation source for vacuum evaporation apparatus

Publication Date: 2022.10.06 ULVAC INC

AI summary

The evaporation source for use in the vacuum evaporation apparatus in vacuum evaporation of a film formation object inside a vacuum chamber has: a main cylindrical body having a crucible part to be filled with an evaporation material Em; a secondary cylindrical body protruded from such a portion of the main cylindrical body as is positioned above the evaporation material; and a heater capable of heating the evaporation material that is filled in the crucible part. The secondary cylindrical body is detachably mountable on the main cylindrical body while shifting a phase of the discharge opening. A lid body is disposed in a manner to open or close an upper-surface opening of the crucible part. In a state in which the upper-surface opening of the crucible part is blocked by the lid body in a vacuum atmosphere, the evaporation material in the crucible part is heated by the heater.