Evaporation Equipment Zone Temperature Control for Film Uniformity
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Solution Overview
Problem
Conventional evaporation equipment struggles to achieve uniformity and evenness in film coating thickness, particularly for larger areas, due to limitations in evaporation sources and materials, which affects the performance and lifespan of OLED devices.
Innovation Solution
The evaporation equipment features a support with multiple zones and a zone temperature controlling device comprising temperature controlling parts and devices that measure and adjust temperatures to control deposition rates, ensuring uniform film thickness through precise temperature management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional evaporation equipment is used for film coating, then the manufacturing process can be completed, but the uniformity and evenness of film coating thickness deteriorate
Solution Approach 1:
The support is divided into multiple zones (first zone, second zone, third zone, etc.) corresponding to different evaporation regions of the substrate. Each zone has its own temperature controlling part that can be independently controlled. This segmentation allows different regions to be heated or cooled independently, enabling precise control of deposition rates across the substrate surface and achieving uniform film thickness.
Solution Approach 2:
Different zones of the support are equipped with independent temperature controlling parts that can provide different temperatures according to local requirements. The temperature controlling device adjusts temperatures of different zones differently based on measured film thickness in each region, implementing local quality control to achieve overall uniformity.
2Manufacturing precision
If temperature controlling parts are added to each zone, then film coating uniformity is improved, but device complexity increases
Solution Approach 1:
The temperature controlling device serves multiple functions: it controls temperatures of all temperature controlling parts, receives thickness information from the measuring device, determines which zones need adjustment, and sends control signals to adjust temperatures. This multi-functionality reduces the need for separate control systems for each zone and simplifies the overall device architecture.
Solution Approach 2:
The system implements a feedback loop where the film thickness measuring device measures the thickness of film coating in different evaporation regions, provides this information to the temperature controlling device, which then determines whether temperature adjustment is needed and controls the temperature controlling parts accordingly. This closed-loop feedback ensures uniform film thickness while allowing adaptive control.
3Manufacturing precision
If zone temperature control is implemented, then deposition rate control is improved, but energy consumption increases
Solution Approach 1:
Instead of controlling temperatures uniformly across all zones, the system applies temperature control only to the specific zones that require it based on measured film thickness. The temperature controlling device determines which zones need temperature adjustment and controls only those zones, avoiding unnecessary energy consumption in zones that are already within the desired thickness range.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for the measurement and adjustment of film thickness on each region of the substrate, ensuring that subsequent substrates are coated with uniform and even film thickness, thereby improving the performance and lifespan of OLED devices.
Implementation Method 1
a heating part, which is connected with the liquid accommodation chamber and is configured to heat liquid inside the liquid accommodation chamber
Implementation Method 2
a cooling part, which is connected with the liquid accommodation chamber and is configured to cool the liquid inside the liquid accommodation chamber
Implementation Method 3
film coating by evaporation is one of the most critical steps
Implementation Method 4
The evaporation equipment may include... a support, which is arranged for loading a substrate to be coated by evaporation process
Data Source
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AI summary
The disclosed in the present disclosure is an evaporation equipment and an evaporating method. The evaporation equipment may include: a support, which is arranged for loading a substrate to be evaporated; and a zone temperature controlling device, which includes at least two temperature controlling parts and at least one temperature controlling device. A loading surface of the support may include a plurality of zones, and each of the plurality of zones may correspond to an evaporation region of the substrate to be evaporated. And each of the plurality of zones may be arranged with a temperature controlling part, and the temperature controlling device may be configured to control temperatures provided by the temperature controlling parts, so as to control corresponding deposition rates of film coating on the evaporation regions.