Evaporator With Adjustable Aperture for Coating Width Control

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing coating technologies face challenges in controlling the deposition rate and geometric expansion of evaporated material inside a vacuum chamber, particularly when coating substrates of varying sizes, leading to inefficiencies and material loss.

Innovation Solution

The evaporator features an outlet arrangement with a flow-through cross-section of variable size and geometry, allowing for in situ adjustment of the evaporation rate and geometric expansion of the evaporated material to match the substrate size, thereby optimizing coating efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the evaporation aperture has a fixed size, then the equipment is simple to manufacture, but the coating width cannot be adjusted to match different substrate sizes, leading to material loss

Engineering Contradiction:
Improvecoating width adjustmentVSAvoidoutlet arrangement structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The outlet arrangement incorporates a movable shutter that can dynamically adjust the opening size of the evaporation aperture. This dynamic element allows the coating width to be adapted to different substrate sizes while maintaining a relatively simple overall structure, resolving the contradiction between adaptability and device complexity.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The invention changes the parameter of the aperture opening size through the movable shutter mechanism. By adjusting the shutter position, the effective coating width parameter can be varied to match different substrate dimensions, enabling adaptability without requiring complete structural redesign.

Inventive Principle:
Principle #35Parameter changes

2Length of moving object

If the evaporation aperture size is increased to coat wider substrates, then the coating width is improved, but the deposition rate control becomes more difficult and material loss increases

Engineering Contradiction:
Improvecoating widthVSAvoiddeposition rate control
Core Design Contradiction:
Length of moving objectVSManufacturing precision

Solution Approach 1:

The movable shutter provides dynamic control over the effective aperture size, allowing precise adjustment of the evaporation area. This enables better control of the deposition rate while achieving the required coating width, as the vapor source size can be optimized for each specific coating task.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The shutter mechanism allows different portions of the aperture to be opened or closed selectively. This local control capability enables precise adjustment of the vapor emission area, improving deposition rate control and reducing material loss by limiting evaporation to only the areas that need coating.

Inventive Principle:
Principle #3Local quality

3Productivity

If the evaporator is designed for a predefined substrate width, then the device structure is simple, but it becomes ineffective when coating substrates of reduced or varying width, causing material spoilage

Engineering Contradiction:
Improvecoating efficiencyVSAvoidevaporation material loss
Core Design Contradiction:
ProductivityVSLoss of substance

Solution Approach 1:

The movable shutter enables the evaporator to dynamically adapt its effective coating width to match the actual substrate width. This prevents the evaporation of material that would not be utilized, significantly improving coating efficiency and reducing material loss when processing substrates of varying dimensions.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The shutter system allows the evaporator to self-adjust its operational parameters (effective aperture size) according to the substrate being processed. This self-adaptation capability ensures that the evaporation material is used efficiently without requiring external intervention or complex control systems.

Inventive Principle:
Principle #25Self-service

4Adaptability or versatility

If the aperture size is adjusted during the coating process, then the adaptability to different substrate sizes is improved, but the device complexity and control difficulty increase

Engineering Contradiction:
Improvein situ adjustment capabilityVSAvoidaperture control
Core Design Contradiction:
Adaptability or versatilityVSEase of operation

Solution Approach 1:

The movable shutter provides a straightforward mechanical means for in-situ adjustment of the aperture size during the coating process. This dynamic adjustment capability improves adaptability to different substrate sizes while maintaining ease of operation through simple mechanical control rather than complex automated systems.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables precise adjustment of the coating width and evaporation rate, reducing material loss and contamination, while allowing for efficient use of coating material and minimizing setup time for varying coating requirements.

Implementation Method 1

a solid or liquid coating material, e.g. a metallic coating material, is evaporated. This typically implies a heating of the evaporation material up to an evaporation temperature, e.g. in a vacuum atmosphere, to transition into a gaseous or evaporated state

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 2

In vacuum deposition there may be applied various deposition methods, by way of which a solid or liquid coating material, e.g. a metallic coating material, is evaporated... Once the evaporation material is sufficiently evaporated a thin-film is formed on the substrate as a coating

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentEP4545677A1Evaporator for coating substrates
Publication Date: 2025.04.30 NEOVAC GMBH
  • EP4545677A1 patent drawingFigure 1~2
  • EP4545677A1 patent drawingFigure 3~4
  • EP4545677A1 patent drawingFigure 5~7

AI summary

The present disclosure relates to an evaporator (10) for use inside an evaporation chamber (8) and configured to evaporate an evaporation material (12), the evaporator (10) comprising: - an evaporation crucible (20) comprising an evaporation cavity (19) to contain evaporation material (14), - an outlet arrangement (24) in flow connection with the evaporation cavity (19) and comprising an evaporation aperture (26) for evaporated evaporation material (14) to flow from the evaporation cavity (19) into the evaporation chamber (8), wherein the aperture (26) comprises a flow-through cross-section of variable and/or adjustable size.