Chronological Event Overlay for Substrate Processing Abnormality Analysis
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Solution Overview
Problem
Existing semiconductor manufacturing technologies struggle to promptly determine the cause of abnormalities in manufacturing apparatuses, leading to prolonged resolution times due to difficulties in distinguishing between operational issues and apparatus changes over time.
Innovation Solution
An information processing apparatus that acquires and displays processing results and event information chronologically, superimposing event occurrences on graphs to facilitate rapid identification of abnormality causes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If statistical processing results are displayed to detect abnormalities, then abnormality detection capability is improved, but the ability to determine the cause of abnormalities deteriorates
Solution Approach 1:
The patent combines statistical processing results with event information into a single integrated display. The graph shows both the processing results (for abnormality detection) and event markers (for cause determination) together, allowing operators to simultaneously identify abnormalities and their causes without switching between separate displays or performing additional analysis.
Solution Approach 2:
Event information acts as an intermediary that connects processing results to their causes. By displaying event markers (such as maintenance events, parameter changes, or operational events) on the same graph as processing results, the system provides a visual link between what happened and when it happened, enabling rapid cause determination.
2Measurement precision
If detailed analysis of abnormalities is performed to determine causes, then accuracy of cause determination is improved, but time required to resolve abnormalities increases
Solution Approach 1:
The system performs preliminary organization and display of event information in chronological order alongside processing results. By having event data pre-processed and visually positioned on the graph before analysis is needed, operators can immediately see potential causes when an abnormality occurs, eliminating the need for time-consuming manual investigation of what events preceded the abnormality.
3Ease of manufacture
If separate displays are used for processing results and event information, then data organization is improved, but ease of cause analysis deteriorates
Solution Approach 1:
The patent merges processing results and event information into a single integrated graph display. This allows operators to perform cause analysis by simply observing the relative positions of event markers and abnormal points on the same graph, eliminating the need to cross-reference separate displays or mentally correlate data from different sources.
Data Source
AI summary
An information processing apparatus includes an acquisition unit configured to acquire information including a processing result of processing a substrate by a substrate processing apparatus configured to perform substrate processing at a first timing, event information about an event having occurred in the substrate processing apparatus at a second timing after the first timing, and a processing result of processing the substrate by the substrate processing apparatus at a third timing after the second timing, and a display control unit configured to perform control so that a display device displays a chronological graph of a processing result including the processing result at the first timing and the processing result at the third timing based on the information acquired by the acquisition unit, wherein the display control unit performs control to display information in a superimposed manner on the graph, the information indicating the second timing.