Automatic Calibration of Examination Tool Optical Devices
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Solution Overview
Problem
Current examination tools require manual and time-consuming calibration processes, which are inefficient and prone to human error, especially in high-precision applications like semiconductor fabrication.
Innovation Solution
A system and method for automatically calibrating examination tools using a processing circuitry that obtains data sets of light parameters for different positions and orientations of moveable elements, determines required values, and uses Bayesian optimizers or convex cost functions to calibrate the elements, enabling precise matching of light parameters.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual calibration is used for examination tools, then human operators can adjust parameters, but the process is time-consuming and inefficient
Solution Approach 1:
The patent replaces manual mechanical calibration operations with an automated optical measurement system. The system uses a light source, optical devices, and detectors to automatically measure and determine calibrated positions of moveable elements, eliminating the need for human operators to manually adjust and measure calibration parameters.
Solution Approach 2:
The examination tool performs self-calibration through the automated system. The processing circuitry automatically obtains measurement data, determines calibrated positions, and adjusts moveable elements without requiring external human intervention, enabling the system to calibrate itself efficiently.
2Reliability
If manual calibration is performed, then human judgment can be applied, but the process is prone to human error
Solution Approach 1:
The patent replaces human judgment and manual measurement with an automated optical measurement system. The system uses light transmission through optical devices and detectors to objectively measure positions and orientations, eliminating human error and subjectivity from the calibration process while maintaining high precision through automated data processing.
3Adaptability or versatility
If traditional calibration methods are used, then individual optical devices can be calibrated, but multiple devices require sequential calibration increasing time
Solution Approach 1:
The patent combines multiple calibration operations into a single integrated automated process. The system can simultaneously or sequentially calibrate multiple optical devices without requiring separate manual procedures for each device, as the automated measurement and control system manages all calibration tasks efficiently in one coordinated process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed solution significantly reduces calibration time, improves accuracy, and eliminates the need for human intervention, allowing for simultaneous calibration of multiple optical devices and adaptability to various examination tools.
Implementation Method 1
a light source producing an illuminating beam transmitted along a light path, and a plurality of optical devices located on said light path
Data Source
AI summary
There are provided systems and methods of calibration of an examination tool comprising at least one given optical device associated with a given moveable element, at least one of a position or an orientation of the given moveable element having to be calibrated, the system being configured to obtain a data set comprising values for one or more given parameters characterizing light transmitted by the at least one given optical device for different values of the position or of the orientation of the given moveable element, one or more required values for the one or more given parameters, and use the data set and the one or more required values to determine data informative of at least one of a calibrated position or a calibrated orientation of the given moveable element, enabling the one or more parameters to have values matching the one or more required values.