Heat Exchange Device Microbubble Reduction via Surface Wetting
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Solution Overview
Problem
Microbubbles in liquids pose challenges during semiconductor wafer processes like photolithography, as they can cause defects and errors due to their nucleation on surfaces, and existing methods struggle to effectively remove them.
Innovation Solution
An apparatus and method involving an exchange device with surface features that contact the liquid to displace or dissolve gas from nucleation sites, reducing microbubble formation by wetting the surfaces and applying pressure to push the liquid into crevices, thereby minimizing nucleation sites and eliminating microbubbles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If filtration methods are used to remove particles, then particle removal is effective, but microbubble elimination remains challenging
Solution Approach 1:
The exchange device is pre-treated by the liquid to wet the surface features and displace trapped gas before the liquid flows through the device during normal operation. This preliminary conditioning action prevents microbubble formation during subsequent fluid exchange operations.
Solution Approach 2:
The liquid's wetting action, which could potentially cause gas displacement and bubble formation, is converted into a beneficial effect by using the same wetting action to displace trapped gas from surface features and prevent microbubble nucleation sites.
2Object-generated harmful factors
If gas is trapped in surface crevices, then nucleation sites are created, but liquid wetting can dissolve gas into the liquid
Solution Approach 1:
The system changes the pressure parameter by applying pressure to the liquid to enhance gas dissolution from surface features into the liquid, thereby eliminating nucleation sites while maintaining reliable gas removal.
3Reliability
If pressure is applied to the liquid, then gas is dissolved into the liquid, but pump operation complexity increases
Solution Approach 1:
The liquid flow through the exchange device automatically provides the pressure needed to dissolve gas from surface features into the liquid. The system uses its own operating conditions (liquid flow and pressure) to achieve gas dissolution without requiring external intervention or complex additional pumping operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly reduces microbubble counts in treated liquids, improving process reliability and reducing equipment downtime by effectively eliminating microbubbles, allowing for optimized pump operation and improved substrate coating processes.
Implementation Method 1
The wetting nature of the surface interaction with the liquid allows liquid to coat the surface and displace air pockets in surface
Implementation Method 2
According to Henry's Law, the higher the pressure, the more gas that can be dissolved into the liquid
Data Source
AI summary
Versions of the invention include methods for reducing microbubbles in liquids treated by heat or mass exchange devices. The exchange devices may be conditioned by having gases in crevices and surfaces displaced by a liquid. The methods can be used to prepare liquids with reduced numbers of microbubbles.