Excimer Lamp Auxiliary Electrode Reduces Base Thickness
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Solution Overview
Problem
Excimer lamps with discharge vessels having a flat quadrilateral cross section face issues with gas flow turbulence and inefficient ultraviolet irradiation due to the thickness of the lamp base, which hinders smooth gas flow and effective UV transmission when used in processes like ozone generation and direct object irradiation.
Innovation Solution
The introduction of an auxiliary electrode that extends to a region where the distance between the plane face parts is reduced, allowing the power lead to be connected within a concave part or pinch seal, minimizing the protrusion of the weld and reducing the thickness of the lamp base, thus preventing gas flow hindrance and enabling closer object irradiation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the lead is connected by welding with glass solder on the external electrode, then the connection is secure, but the weld portion protrudes from the outer surface making the lamp base thickness much larger
Solution Approach 1:
The patent changes the connection location from the outer surface (thickness direction) to the end surface of the discharge vessel. The lead is bent along the outer surface and connected to the auxiliary electrode at the end surface, where it protrudes less in the thickness direction, thereby reducing lamp base thickness while maintaining connection strength.
2Reliability
If the lamp base thickness is large, then the lead connection is stable, but the excimer lamp cannot be disposed closely to the object to be processed reducing UV irradiation effectiveness
Solution Approach 1:
The connection is relocated to the end surface dimension rather than the outer surface dimension. This allows the lead to be securely connected while minimizing thickness direction protrusion, enabling the lamp to be positioned closer to the processing object for effective UV irradiation.
3Strength
If the lamp base thickness is large, then the lead connection is secure, but gas flow turbulence occurs behind the lamp base hindering smooth flow
Solution Approach 1:
The lead connection is moved to the end surface region where it creates minimal obstruction to gas flow in the longitudinal direction. The auxiliary electrode extends to a region where the distance between plane face parts is reduced, allowing the lead to connect without protruding into the gas flow path, thus maintaining smooth laminar flow.
4Length of stationary object
If the auxiliary electrode extends to a region where distance between plane face parts is reduced, then the lamp base thickness is minimized, but the connection region becomes more constrained
Solution Approach 1:
The electrode system is segmented into the external electrode and the auxiliary electrode. The auxiliary electrode is provided separately on the discharge vessel and extends to the constrained region, allowing the lead to connect in this specific area without affecting the external electrode's primary function, thus minimizing lamp base thickness while managing connection constraints.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures smooth gas flow and reduces ultraviolet attenuation, allowing for effective processing by minimizing the thickness of the lamp base and maintaining efficient UV irradiation.
Implementation Method 1
an auxiliary electrode that extends to a region where the distance between the plane face parts is reduced
Implementation Method 2
a discharge vessel having a flat quadrilateral cross section... contains therein as a light emitting gas a rare gas such as xenon gas or krypton gas... radiate ultraviolet, in particular, ultraviolet having shorter wavelengths
Implementation Method 3
the weld portion (solder) 27 protrudes from the outer surface in the thickness direction of the discharge vessel 22
Implementation Method 4
Vacuum ultraviolet emitted from the excimer lamp travels a short distance in a gas, and attenuates as it is absorbed by the surrounding gas
Data Source
AI summary
In the excimer lamp according to the present invention, a flat discharge vessel having a substantially rectangular cross-sectional shape and comprising a pair of planar parts and a pair of side-surface parts has a pair of external electrodes disposed on the respective outer surfaces of the planar parts. The end parts of the external electrodes are provided with an auxiliary electrode extending to a region that is made smaller than the distance between the planar parts. A lead that supplies electricity to the external electrode is connected to the auxiliary electrode in the region that is made smaller than the distance between the planar parts.