Excimer Laser Beam Splitter With Through-Hole Transmission Region
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Solution Overview
Problem
Existing laser generators with high-transmission beam splitters suffer from energy attenuation and homogeneity degradation due to pollution, leading to inconsistent laser beam quality over time.
Innovation Solution
Incorporating a beam splitter with a through-hole transmission region and a reflective region at its periphery, allowing direct transmission and reflection of the laser beam, respectively, thereby avoiding passage through a high-transmission sheet and maintaining beam homogeneity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If a high-transmission sheet beam splitter is used, then the laser beam can be transmitted with 98% efficiency, but the beam splitter becomes polluted over time causing energy attenuation and homogeneity degradation
Solution Approach 1:
The beam splitter is segmented into a through-hole region for direct transmission and a reflective region for reflection, eliminating the need for a high-transmission sheet that is prone to pollution. This segmentation allows the transmission path to be separate from components that would otherwise be exposed to laser beam contamination.
Solution Approach 2:
The harmful high-transmission sheet material is extracted and removed from the system. Instead of using a sheet that requires high transmission properties and is therefore susceptible to pollution, the invention extracts this problematic component and replaces it with a through-hole structure that achieves transmission without the polluting medium.
2Ease of operation
If a high-transmission sheet is used for beam splitting, then the laser beam transmission is achieved, but the homogeneity of the transmitted laser beam is degraded due to pollution
Solution Approach 1:
The beam splitter aperture is segmented into a through-hole region for direct transmission and a reflective region surrounding it. This segmentation creates a clean transmission path through the through-hole that does not involve passing through a high-transmission sheet, thereby maintaining beam homogeneity while still achieving the beam splitting function.
Solution Approach 2:
The through-hole acts as an intermediary structure that enables direct beam transmission without requiring a high-transmission sheet. This intermediary solution provides a clean optical path that maintains beam quality while still allowing the beam splitter to perform its transmission and reflection functions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces the likelihood of beam splitter pollution and enhances the homogeneity and stability of the laser beam, ensuring consistent energy output and improved scanning annealing performance.
Implementation Method 1
a mixed gas consisted of xenon gas, neon gas, helium gas is discharged at a high voltage to generate photon, forming a laser beam
Implementation Method 2
a mixed gas consisted of xenon gas, neon gas, helium gas is discharged at a high voltage to generate photon
Implementation Method 3
2% of the laser beam is reflected to the reflective sheet 03 and finally arrives at the energy monitoring unit 04
Data Source
Figure 1~2
Figure 3~4
Figure 5~6
AI summary
Embodiments of the present invention provide a beam splitter, a laser generator and an excimer laser annealing apparatus, which relate to field of display technology, and reduce probability of pollution of the beam splitter to some extent and increase homogeneity of the laser beam that is passed through the beam splitter. The beam splitter includes a transmission region configured as a through-hole and a reflective region arranged at a periphery of the through-hole, wherein the through-hole is configured to be transmitted by a first laser beam that is received; and the reflective region is configured to reflect the first laser beam that is received. The beam splitter may be used in a laser generator to perform a scanning annealing process.